Diffraction efficiency of a grating coupler for an array illuminator

被引：12

作者：

Nakaya, T

Katoh, Y

Kubota, T

Takeda, M

机构：

[1] KYOTO INST TECHNOL,DEPT ELECTR & INFORMAT SCI,SAKYO KU,KYOTO 606,JAPAN

[2] UNIV ELECTROCOMMUN,DEPT COMMUN & SYST ENGN,CHOFU,TOKYO 182,JAPAN

来源：

APPLIED OPTICS | 1996年 / 35卷 / 20期

关键词：

array illuminator; grating coupler; diffraction efficiency; optical computing;

D O I：

10.1364/AO.35.003891

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The diffraction efficiency of a grating coupler having a surface-relief grating is calculated by the use of coupled-wave theory. The grating couplers are fabricated to examine the validity of the calculated result. The dependence of the measured diffraction efficiency on the groove depth of the grating coupler agrees well with the calculated results. The array illuminator, which emits 10 and 20 beams with equal intensity, is designed and fabricated through the use of these numerical results. The uniformity error of the output beam caused by the error of the diffraction efficiency is also discussed. (C) 1996 Optical Society of America

引用

页码：3891 / 3898

页数：8

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