Characterization of amorphous aluminium oxide thin films synthesized by mist-CVD

被引：0
|
作者：
Yatabe, Zenji [1 ]
Nishiyama, Koshi [1 ]
Tsuda, Takaaki [1 ]
Nishimura, Kazuki [1 ]
Nakamura, Yusui [1 ,2 ]
机构：
[1] Kumamoto Univ, Kumamoto, Japan
[2] Kumamoto Phoen, Kumamoto, Japan
来源：
2019 COMPOUND SEMICONDUCTOR WEEK (CSW) | 2019年
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
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页数：1
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