Design of temperature controlled micro-hotplate for CMOS CO sensor

被引：0

作者：

Peng, Benxian ^{[1
]}

Yu, Ting ^{[1
]}

Yu, Fengqi ^{[1
]}

机构：

[1] Chinese Acad Sci, Shenzhen Inst Adv Technol, Dept Integrated Elect, Shenzhen 518067, Peoples R China

来源：

2008 3RD IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1-3 | 2008年

关键词：

finite difference algorithm; subthreshold region; micro-hotplate; CO sensor;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A novel design for the temperature control of a micro-hotplate gas sensor is presented. Finite difference algorithm is developed to solve the sensor temperature stability problem under ambient air interference. A simple circuit is proposed to accurately adjust the micro-hotplate temperature with a resolution of 0.04 degrees C. The proposed sensor has ultra low power consumption (about 13.9 mu W) and is a good candidate for wireless sensor network applications.

引用

页码：895 / 898

页数：4

共 6 条

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