Thermo-optical properties of porous silica thin films produced by sol-gel method

被引：6

作者：

Jaglarz, Janusz ^{[1
]}

Dulian, Piotr ^{[2
]}

Karasinski, Pawel ^{[3
]}

机构：

[1] Cracow Univ Technol, Fac Mat Engn & Phys, 37 JPII St, PL-31155 Krakow, Poland

[2] Cracow Univ Technol, Fac Chem Engn & Technol, 24 Warszawska St, PL-31155 Krakow, Poland

[3] Silesian Tech Univ, Dept Optoelect, 2 B Krzywoustego St, PL-44100 Gliwice, Poland

来源：

MATERIALS CHEMISTRY AND PHYSICS | 2020年 / 243卷 / 243期

关键词：

Sol-gel process; Thin films; Spectroscopic ellipsometry; Porous silica film; Antireflection coatings; ANTIREFLECTIVE FILMS; SURFACE-ROUGHNESS; COATINGS; TRANSMITTANCE; COEFFICIENTS; FABRICATION; TAILS; LAYER;

D O I：

10.1016/j.matchemphys.2019.122603

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this work, the spectral dispersion of optical constants of porous silica thin films have been presented. To determine the optical properties of porous SiO2 films, the ellipsometer Woolam M - 2000 working in the spectral range 190-1700 nm was applied. The thermo-optical coefficients of porous SiO2 films and thermal thickness dependence in temperature range 25-300 degrees C have been determined. The porous SiO2 layers exhibited low refractive indices. The thermo-optical coefficients of presented samples were negative due to the porous structure of SiO2 films. Moreover, it has been stated that thinness has been independent of temperature. After returning to starting conditions, the refractive indices were closer to starting values which confirmed partial reversibility of the heating and cooling process of porous. The thermal properties of porous silica films have been discussed.

引用

页数：6

共 36 条

[1]

[Anonymous], HDB OPTICAL CONSTANT

[2]

[Anonymous], HDB ELLIPSOMETRY

[3] INVESTIGATION OF EFFECTIVE-MEDIUM MODELS OF MICROSCOPIC SURFACE-ROUGHNESS BY SPECTROSCOPIC ELLIPSOMETRY [J].

ASPNES, DE ;

THEETEN, JB .

PHYSICAL REVIEW B, 1979, 20 (08) :3292-3302

[4] Silica antireflective films on glass produced by the sol-gel method [J].

Bautista, MC ;

Morales, A .

SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2003, 80 (02) :217-225

[5] URBACH TAILS IN THE ABSORPTION-SPECTRA OF AMORPHOUS AND CRYSTALLINE SIO2 [J].

BOSIO, C ;

CZAJA, W .

PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1991, 63 (01) :7-14

[6]

Brinker C. J., 1990, SOL GEL SCI PHYS CHE, DOI 10.1016/C2009-0-22386-5

[7] Anti-reflection (AR) coatings made by sol-gel processes: A review [J].

Chen, DG .

SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2001, 68 (3-4) :313-336

[8] EFFECTS OF H2O ON STRUCTURE OF ACID-CATALYZED SIO2 SOL-GEL FILMS [J].

FARDAD, MA ;

YEATMAN, EM ;

DAWNAY, EJC ;

GREEN, M ;

HOROWITZ, F .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1995, 183 (03) :260-267

[9] Comparing methods for measuring thickness, refractive index, and porosity of mesoporous thin films [J].

Galy, Tiphaine ;

Marszewski, Michal ;

King, Sophia ;

Yan, Yan ;

Tolbert, Sarah H. ;

Pilon, Laurent .

MICROPOROUS AND MESOPOROUS MATERIALS, 2020, 291

[10]

Ghosh G., 1998, Handbook of thermo-optic coefficients of optical materials with applications

← 1 2 3 4 →