The enhancement of the deflection effect in InGaN/GaN light-emitting diodes with an ellipsoidal air tunnel

被引:0
作者
Kim, Hyun Kyu [1 ]
Ryu, Jae Hyoung [1 ]
Kim, Hee Yun [1 ]
Kang, Ji Hye [1 ]
Han, Nam [1 ]
Park, Young Jae [1 ]
Ryu, Beo Deul [1 ]
Ko, Kang Bok [1 ]
Baek, Yun Seon [1 ]
Lysak, Volodymyr-V. [1 ]
Hong, Chang-Hee [1 ]
Kim, Hyung Gu [2 ]
机构
[1] Chonbuk Natl Univ, Sch Semicond & Chem Engn, Chonju 561756, South Korea
[2] LG Elect Inst Technol, Devices Mat R&D Lab, Seoul 137724, South Korea
关键词
Wet etching; GaN-LED; Reflow; Air structure; PATTERNED SAPPHIRE SUBSTRATE; EXTRACTION ENHANCEMENT;
D O I
10.1016/j.sse.2011.11.026
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper reports on the deflection effect of ellipsoidal air tunnel (EAT) array as an embedded deflector with low refractive index in InGaN/GaN light-emitting diodes (LEDs). Light extraction efficiency (LEE) for different height-to-width (h/w) ratios of air structure is analyzed by using an optical simulation program. Maximum LEE was obtained at a h/w ratio of 0.3, which corresponds to an ellipsoidal shape of the air structure. An LED structure with EAT array embedded between the sapphire substrate and the GaN epitaxial layer has been fabricated. The reflectance spectra measured over the entire visible spectral range showed reflectance modulations by the EAT structures. Moreover, the light-output power of the EAT-embedded LED was enhanced by 2.3 times compared to a conventional LED without EAT arrays. This could be attributed to the enhanced light deflection from EAT structures. (c) 2011 Elsevier Ltd. All rights reserved.
引用
收藏
页码:14 / 17
页数:4
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