Metal-semiconductor-metal photodetectors using widegap semiconductor capping layer

被引:1
|
作者
Lee, HY [1 ]
Lee, CT [1 ]
机构
[1] Natl Cent Univ, Inst Opt Sci, Chungli 32054, Taiwan
来源
PROCEEDINGS OF THE SIXTH CHINESE OPTOELECTRONICS SYMPOSIUM | 2003年
关键词
D O I
10.1109/COS.2003.1278154
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
To improve the Schottky contact performances and carrier confinement. We employed the wide bandgap material InAlGaP for the capping in the metal-semiconductor-metal photodetectors (MSM-PDs). The electrical behaviors of InAlGaP/GaAs MSM-PD are studied by reverse dark current-voltage measurements at different temperatures. The reverse characteristics of the Schottky contact are examined by taking into account the dependence of the barrier height on the electric field in the depletion region and hence on the applied bias. We investigated the possibilities of evaluating the main Schottky contact parameters straight on the MSM-PD structure with and without capping layer InAlGaP. We also measured the relationship between the photoresponsivity and difference photon wavelength.
引用
收藏
页码:15 / 18
页数:4
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