Sputter deposition of tungsten trioxide for gas sensing applications

被引：28

作者：

Di Giulio, M ^{[1
]}

Manno, D ^{[1
]}

Micocci, G ^{[1
]}

Serra, A ^{[1
]}

Tepore, A ^{[1
]}

机构：

[1] Univ Lecce, Dipartimento Sci Mat, I-73100 Lecce, Italy

来源：

JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS | 1998年 / 9卷 / 04期

关键词：

D O I：

10.1023/A:1008889009741

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Tungsten trioxide thin films were grown by reactively sputtering a circular WO3 target in different Ar-O-2 atmospheres. After deposition, data an the structural, optical and electrical properties were obtained by using transmission electron microscopy (TEM) to examine the structure and the morphology of the films, UV-VIS spectrophotometry to determine optical absorption edge characteristics, and Hall effect measurements to determine the change carrier mobility and the film resistivity. In addition, the film resistance variations in controlled atmospheres were examined and the gas sensing properties of films grown under different conditions were compared. The aim of the study was to examine the effect of O-2 concentration in the sputtering atmosphere on structural, optical, electrical and sensing properties. (C) 1998 Kluwer Academic Publishers.

引用

页码：317 / 322

页数：6

共 16 条

[1]

Chapman BN, 1980, Glow Discharges Processes J, DOI DOI 10.1063/1.2914660

[2]

DEMARNE V, 1993, SENS ACTUATORS B, V15, P1

[3]

DITTMAR A, 1994, P 1 EUR SCH SENS LEC, P148

[4] NEW MATERIALS AND TRANSDUCERS FOR CHEMICAL SENSORS [J].

GOPEL, W .

SENSORS AND ACTUATORS B-CHEMICAL, 1994, 18 (1-3) :1-21

[5]

GOPEL W, 1994, P 1 EUR SCH SENS LEC, P49

[6]

Heavens OS., 1964, PHYS THIN FILMS, P193

[7]

Liu Y, 1996, J MATER SCI-MATER EL, V7, P279, DOI 10.1007/BF00188955

[8]

MANDELIS A, 1993, PHYSICS CHEM TECHNOL

[9] Structural and electrical properties of sputtered vanadium oxide thin films for applications as gas sensing material [J].

Manno, D ;

Serra, A ;

DiGiulio, M ;

Micocci, G ;

Taurino, A ;

Tepore, A ;

Berti, D .

JOURNAL OF APPLIED PHYSICS, 1997, 81 (06) :2709-2714

[10] Metal oxide sensors [J].

Meixner, H ;

Lampe, U .

SENSORS AND ACTUATORS B-CHEMICAL, 1996, 33 (1-3) :198-202

← 1 2 →