Absolute fringe order calculation using optimised multi-frequency selection in full-field profilometry

被引:134
作者
Towers, CE [1 ]
Towers, DP [1 ]
Jones, JDC [1 ]
机构
[1] Heriot Watt Univ, Sch Engn & Phys Sci, Edinburgh EH14 4AS, Midlothian, Scotland
基金
英国工程与自然科学研究理事会;
关键词
interferometry; multi-frequency; absolute profilometry;
D O I
10.1016/j.optlaseng.2004.08.005
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We present novel algorithms using multi-frequency analysis for full-field profilometry. The technique provides absolute order of interference in an interferogram. The process is based on an optimisation criterion to utilise the minimum number of projected fringe frequencies to give the largest possible measurement dynamic range. The algorithms presented have been generalised for n frequencies. A set of solutions for three-frequency interferometry is presented that satisfies the optimisation criterion. Results are presented for 3 projected fringe frequencies and we demonstrate by simulation that the approach is indeed optimal. The algorithms given are generic and are equally applicable to any metrological measurement using interferometry. (c) 2004 Elsevier Ltd. All rights reserved.
引用
收藏
页码:788 / 800
页数:13
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