Deformation behavior of gold nano-pillars prepared by nanoimprinting and focused ion-beam milling

被引：35
作者：
Dietiker, M. [1 ]
Buzzi, S. [2 ]
Pigozzi, G. [1 ]
Loeffler, J. F. [2 ]
Spolenak, R. [1 ]
机构：
[1] ETH, Dept Mat, Lab Nanomet, CH-8093 Zurich, Switzerland
[2] ETH, Dept Mat, Lab Met Phys & Technol, CH-8093 Zurich, Switzerland
来源：
ACTA MATERIALIA | 2011年 / 59卷 / 05期
关键词：
Compression test; Plastic deformation; Nanostructured metals; Mechanical properties; Ion beam processing; STRAIN GRADIENT PLASTICITY; DISCRETE DISLOCATION SIMULATIONS; MECHANICAL-PROPERTIES; THIN-FILMS; SUBMICROMETER-PILLARS; SINGLE-CRYSTALS; LENGTH SCALE; MICRON SCALE; STRENGTH; HARDNESS;
D O I：
10.1016/j.actamat.2010.12.019
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The deformation behavior of single- and polycrystalline gold pillars with diameters in the 150-1000 nm range was investigated at room temperature by compression testing. The pillars were produced by nanoimprinting and focused ion-beam (FIB) milling, and characterized by scanning electron microscopy (SEM) and electron backscatter diffraction (EBSD). No significant differences in the flow strength level or scaling behavior were observed when nanoimprinted pillars were compared with FIB-milled pillars with comparable diameters. These observations justify the use of FIB milling for the study of scaling behavior in this material system. Weibull statistics were used to analyze the distribution of strength levels, and a minimum in experimental scatter was identified at intermediate pillar size in comparison with their microstructural length scales. (C) 2010 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.
引用
收藏
页码：2180 / 2192
页数：13
相关论文
共 43 条
  • [1] Dislocation mechanisms in the first stage of plasticity of nanoindented Au(111) surfaces
    Asenjo, A
    Jaafar, M
    Carrasco, E
    Rojo, JM
    [J]. PHYSICAL REVIEW B, 2006, 73 (07)
  • [2] DEFORMATION OF PLASTICALLY NON-HOMOGENEOUS MATERIALS
    ASHBY, MF
    [J]. PHILOSOPHICAL MAGAZINE, 1970, 21 (170): : 399 - &
  • [3] Effects of pre-strain on the compressive stress-strain response of Mo-alloy single-crystal micropillars
    Bei, H.
    Shim, S.
    Pharr, G. M.
    George, E. P.
    [J]. ACTA MATERIALIA, 2008, 56 (17) : 4762 - 4770
  • [4] Effects of focused ion beam milling on the nanomechanical behavior of a molybdenum-alloy single crystal
    Bei, H.
    Shim, S.
    [J]. APPLIED PHYSICS LETTERS, 2007, 91 (11)
  • [5] Compressive strengths of molybdenum alloy micro-pillars prepared using a new technique
    Bei, H.
    Shim, S.
    George, E. P.
    Miller, M. K.
    Herbert, E. G.
    Pharr, G. M.
    [J]. SCRIPTA MATERIALIA, 2007, 57 (05) : 397 - 400
  • [6] TENSILE STRENGTH OF WHISKERS
    BRENNER, SS
    [J]. JOURNAL OF APPLIED PHYSICS, 1956, 27 (12) : 1484 - 1491
  • [7] Deformation behavior of silver submicrometer-pillars prepared by nanoimprinting
    Buzzi, S.
    Dietiker, M.
    Kunze, K.
    Spolenak, R.
    Loeffler, J. F.
    [J]. PHILOSOPHICAL MAGAZINE, 2009, 89 (10) : 869 - 884
  • [8] Metal direct nanoimprinting for photonics
    Buzzi, Stefano
    Robin, Franck
    Callegari, Victor
    Loeffler, Jorg F.
    [J]. MICROELECTRONIC ENGINEERING, 2008, 85 (02) : 419 - 424
  • [9] Anomalous plastic deformation at surfaces: Nanoindentation of gold single crystals
    Corcoran, SG
    Colton, RJ
    Lilleodden, ET
    Gerberich, WW
    [J]. PHYSICAL REVIEW B, 1997, 55 (24): : 16057 - 16060
  • [10] Nanoindentation of single-crystalline gold thin films: Correlating hardness and the onset of plasticity
    Dietiker, Marianne
    Nyilas, Ralph D.
    Solenthaler, Christian
    Spolenak, Ralph
    [J]. ACTA MATERIALIA, 2008, 56 (15) : 3887 - 3899
12345