Crystallisation of perovskite PZT films on MgO substrates

被引：5
作者：
Barucca, G
De Benedittis, A
Di Cristoforo, A
Majni, G
Mengucci, P
Leccabue, F
Watts, BE
机构：
[1] Univ Ancona, Dipartimento Sci Mat & Terra, INFM, I-60131 Ancona, Italy
[2] CNR, MASPEC, I-43100 Parma, Italy
来源：
THIN SOLID FILMS | 1998年 / 319卷 / 1-2期
关键词：
lead zirconate titanate films; crystallisation; MgO substrates;
D O I：
10.1016/S0040-6090(97)01123-1
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Lead zirconate titanate (PZT) films deposited by sol-gel on MgO substrates have been studied by glancing angle X-ray diffraction (GAD) and scanning (SEM) and transmission (TEM) electron microscopy. To study the possibility of growing preferentially oriented films, two different compositions were considered: Pb(Zr0.52Ti0.48)O-3 and Pb(Zr0.2Ti0.8)O-3. Preliminary results suggest that a preferential orientation occurs depending on the film composition. In particular, a higher Ti content seems to favour the orientation along the [001] direction. (C) 1998 Published by Elsevier Science S.A.
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页码：207 / 210
页数：4
相关论文
共 10 条
[1]  
Budd K. D., 1985, British Ceramic Proceedings, P107
[2]   A study of phase transformations in rapid thermal processed sol gel pzt using glancing angle x-ray diffraction [J].
Griswold, EM ;
Sayer, M ;
Weaver, L .
INTEGRATED FERROELECTRICS, 1995, 8 (1-2) :109-120
[3]   EPITAXIAL-GROWTH AND THE CRYSTALLOGRAPHIC, DIELECTRIC, AND PYROELECTRIC PROPERTIES OF LANTHANUM-MODIFIED LEAD TITANATE THIN-FILMS [J].
IIJIMA, K ;
TAKAYAMA, R ;
TOMITA, Y ;
UEDA, I .
JOURNAL OF APPLIED PHYSICS, 1986, 60 (08) :2914-2919
[4]   EFFECTS OF SURFACE-STRUCTURES OF MGO(100) SINGLE-CRYSTAL SUBSTRATES ON FERROELECTRIC PBTIO3 THIN-FILMS GROWN BY RADIO-FREQUENCY SPUTTERING [J].
KIM, SS ;
BAIK, SG .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1995, 13 (01) :95-100
[5]  
LECCABUE F, 1993, P INT C GAL OCCH OPT, P734
[6]   GROWTH OF YBA2CU3O7 THIN-FILMS ON MGO - THE EFFECT OF SUBSTRATE PREPARATION [J].
MOECKLY, BH ;
RUSSEK, SE ;
LATHROP, DK ;
BUHRMAN, RA ;
LI, J ;
MAYER, JW .
APPLIED PHYSICS LETTERS, 1990, 57 (16) :1687-1689
[7]   SOLID-PHASE EPITAXIAL-GROWTH OF SOL-GEL DERIVED PB(ZR,TI)O-3 THIN-FILMS ON SRTIO3 AND MGO [J].
NASHIMOTO, K ;
FORK, DK ;
ANDERSON, GB .
APPLIED PHYSICS LETTERS, 1995, 66 (07) :822-824
[8]  
SAENGER KL, 1990, MATER RES SOC SYMP P, V200, P115, DOI 10.1557/PROC-200-115
[9]   PREPARATION AND ELECTRICAL-PROPERTIES OF MOCVD-DEPOSITED PZT THIN-FILMS [J].
SAKASHITA, Y ;
ONO, T ;
SEGAWA, H ;
TOMINAGA, K ;
OKADA, M .
JOURNAL OF APPLIED PHYSICS, 1991, 69 (12) :8352-8357
[10]   HIGHLY ORIENTED, CHEMICALLY PREPARED PB(ZR,TI)O3 THIN-FILMS [J].
TUTTLE, BA ;
VOIGT, JA ;
GOODNOW, DC ;
LAMPPA, DL ;
HEADLEY, TJ ;
EATOUGH, MO ;
ZENDER, G ;
NASBY, RD ;
RODGERS, SM .
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1993, 76 (06) :1537-1544
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