Test Structure of Bi-stable Spring towards TopoMEMS Ising Machine

被引：0

作者：

Mita, Yoshio ^{[1
]}

Ezawa, Motohiko ^{[1
]}

Tsuji, Keigo ^{[1
]}

Lebrasseur, Eric ^{[1
]}

Sawamura, Tomoki ^{[1
]}

Tsuboi, Shinji ^{[1
]}

Mizushima, Ayako ^{[1
]}

Ochiai, Yukinori ^{[1
]}

Higo, Akio ^{[1
]}

机构：

[1] Univ Tokyo, Grad Sch Engn, Tokyo, Japan

来源：

2022 IEEE 34TH INTERNATIONAL CONFERENCE ON MICROELECTRONIC TEST STRUCTURES (ICMTS) | 2022年

关键词：

Ising Model; Topological MEMS; leaf springs; test structure;

D O I：

10.1109/ICMTS50340.2022.9898227

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Recently, Ising Model attracts much attention for future quantum annealing computer. We are investigating the World's first Topological Micro Electro Mechanical Systems (TopoMEMS) representation of the Ising Model. As the core component, we propose a unique "compress-and-latch" bi-stable spring structure. Two key parameters identified were an initial gap and stress relief structure. Test structures have been designed, fabricated, and parametrically tested. It was experimentally found that there exists a design window to realize 25um-stroke bi-stable operation with application voltage as low as 9V.

引用

页码：161 / 164

页数：4

共 6 条

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