Engineering of Biomimetic Hair-Flow Sensor Arrays Dedicated to High-Resolution Flow Field Measurements

被引：20

作者：

Dagamseh, A. M. K. ^{[1
]}

Bruinink, C. M. ^{[1
]}

Droogendijk, H. ^{[1
]}

Wiegerink, R. J. ^{[1
]}

Lammerink, T. S. J. ^{[1
]}

Krijnen, G. J. M. ^{[1
]}

机构：

[1] Univ Twente, MESA Res Inst Nanotechnol, NL-7500 AE Enschede, Netherlands

来源：

2010 IEEE SENSORS | 2010年

关键词：

CRICKET;

D O I：

10.1109/ICSENS.2010.5690705

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper addresses the latest developments in biomimetic hair-flow sensors towards sensitive high-density arrays. Improving the electrodes design of the hair sensor, using Silicon-on-Insulator (SOI) wafer technology, has resulted in the ability to measure small capacitance changes as caused by minute rotations of single-hair sensors. The detection limit, as measured in a bandwidth of 3 kHz, was about 1 mm/s air-flow amplitude, an enhancement of 52% in comparison to the previous hair-sensor array design. The directivity pattern was improved now closely resembling a figure of eight. These sensors open possibilities for high-resolution flow pattern observations.

引用

页码：2251 / 2254

页数：4

共 7 条

[1] ADVANCEMENTS IN TECHNOLOGY AND DESIGN OF BIOMIMETIC FLOW-SENSOR ARRAYS
Bruinink, C. M.
Jaganatharaja, R. K.
de Boer, M. J.
Berenschot, E.
Kolster, M. L.
Lammerink, T. S. J.
Wiegerink, R. J.
Krijnen, G. J. M.
[J]. IEEE 22ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2009), 2009, : 152 - 155
[2] FUNCTIONING AND SIGNIFICANCE OF LATERAL-LINE ORGANS
DIJKGRAAF, S
[J]. BIOLOGICAL REVIEWS OF THE CAMBRIDGE PHILOSOPHICAL SOCIETY, 1963, 38 (01): : 51 - &
[3] DIGGER WASP AGAINST CRICKETS .1. RECEPTORS INVOLVED IN THE ANTIPREDATOR STRATEGIES OF THE PREY
GNATZY, W
HEUSSLEIN, R
[J]. NATURWISSENSCHAFTEN, 1986, 73 (04) : 212 - 215
[4] Computational mechanisms of mechanosensory processing in the cricket
Jacobs, Gwen A.
Miller, John P.
Aldworth, Zane
[J]. JOURNAL OF EXPERIMENTAL BIOLOGY, 2008, 211 (11) : 1819 - 1828
[5] MEMS based hair flow-sensors as model systems for acoustic perception studies
Krijnen, GJM
Dijkstra, M
van Baar, JJ
Shankar, SS
Kuipers, WJ
de Boer, RJH
Altpeter, D
Lammerink, TSJ
Wiegerink, R
[J]. NANOTECHNOLOGY, 2006, 17 (04) : S84 - S89
[6] Hair canopy of cricket sensory system tuned to predator signals
Magal, Christelle
Dangles, Olivier
Caparroy, Philippe
Casas, Jerome
[J]. JOURNAL OF THEORETICAL BIOLOGY, 2006, 241 (03) : 459 - 466
[7] Structural scaling and functional design of the cercal wind-receptor hairs of cricket
Shimozawa, T
Kumagai, T
Baba, Y
[J]. JOURNAL OF COMPARATIVE PHYSIOLOGY A-NEUROETHOLOGY SENSORY NEURAL AND BEHAVIORAL PHYSIOLOGY, 1998, 183 (02): : 171 - 186

← 1 →