Tunable Low-Voltage Dual-Directional ESD Protection for RFICs

被引:0
|
作者
Liu, Jian [1 ]
Lin, Lin [1 ]
Wang, Xin [1 ]
Zhao, Hui [1 ]
Tang, He [1 ]
Fang, Qiang [1 ]
Wang, Albert [1 ,2 ]
Yang, Liwu
Xie, Haolu [3 ]
Fan, Siqiang [4 ]
Zhao, Bin [4 ]
Zhang, Gary [5 ]
Wang, Xingang [5 ]
机构
[1] Univ Calif Riverside, Dept EE, Riverside, CA 92521 USA
[2] TransRF Corp, Walnut, CA USA
[3] Fudan Univ, Shanghai, Peoples R China
[4] Freescale Semicond Inc, Irvine, CA USA
[5] Skyworks, Woburn, MA USA
关键词
ESD protection; SCR; dual-directional; RF IC; tunable triggering; LOW TRIGGER-VOLTAGE; CIRCUIT; CMOS; SCR;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper reports a tunable low triggering voltage, dual-directional SCR ESD protection structure in CMOS for RF ICs. A new embedded gate-coupling technique is used to reduce and adjust its triggering voltage. Experiment shows a low discharging resistance of similar to 0.26 Omega, low leakage current of similar to 0.19nA, low parasitic capacitance of similar to 150fF and ultra fast response time of similar to 100pS. This structure achieves ESD protection of >9.20kV HBM and >500V CDM for a 90 mu m device. A high ESD protection to Si ratio of ESDV similar to 8.17V/mu m(2) is obtained for RF IC applications.
引用
收藏
页码:279 / 282
页数:4
相关论文
共 50 条
  • [1] Design of a dual-directional diode-triggered SCR for low voltage ESD protection
    Xu Q.
    Liang H.
    Gu X.
    IEEJ Transactions on Electronics, Information and Systems, 2020, 140 (06) : 673 - 674
  • [2] Design of Dual-Directional SCR Structure With High Holding Voltage and Low Dynamic Resistance for High Voltage ESD Protection
    Do, Kyoung-Il
    Jung, Jin-Woo
    Song, Jooyoung
    Jeon, Chan-Hee
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 2023, 70 (09) : 4509 - 4517
  • [3] A novel dual-directional DTSCR in twin-well process for ultra-low-voltage ESD protection
    Gu, Xiaofeng
    Xu, Jian
    Liang, Hailian
    Liu, Junliang
    Wang, Dong
    Dong, Shurong
    Lei, Wen
    Liou, Juin J.
    SOLID-STATE ELECTRONICS, 2024, 212
  • [4] Compact and Fast Response Dual-Directional SCR for Nanoscale ESD Protection Engineering
    Du, Feibo
    Chang, Kuan-Chang
    Lin, Xinnan
    Hou, Fei
    Zhang, Yuxin
    Han, Aoran
    Luo, Xun
    Liu, Zhiwei
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 2022, 69 (06) : 3490 - 3493
  • [5] Novel Symmetrical Dual-Directional SCR With p-Type Guard Ring for High-Voltage ESD Protection
    Du, Feibo
    Chang, Kuan-Chang
    Lin, Xinnan
    Hou, Fei
    Chen, Le
    Luo, Xun
    Liu, Zhiwei
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 2021, 68 (08) : 4164 - 4167
  • [6] Analysis of Dummy-Gate Dual-Directional SCR (dSCR) Device for ESD Protection
    Wang, Yuan
    Lu, Guangyi
    Cao, Jian
    Jia, Song
    Zhang, Ganggang
    Zhang, Xing
    PROCEEDINGS OF THE 2013 20TH IEEE INTERNATIONAL SYMPOSIUM ON THE PHYSICAL & FAILURE ANALYSIS OF INTEGRATED CIRCUITS (IPFA 2013), 2013, : 720 - 723
  • [7] Dual-directional SCR device with dual-gate controlled mechanism for ESD protection in photoelectric chip
    Liu, Yujie
    Wang, Yang
    Yang, Jian
    Jin, Xiangliang
    SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2024, 39 (02)
  • [8] A novel low trigger voltage low leakage SCR for low-voltage ESD protection
    Liu, Jizhi
    Yang, Feilong
    Liu, Yilin
    SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2024, 39 (02)
  • [9] A Dual-directional SCR based ESD Protection Design with High Holding Voltage using Embedded MOSFET for 12-V Applications
    Do, Kyoung-Il
    Jung, Jin-Woo
    Chae, Hee-Guk
    Song, Jooyoung
    Jeon, Chan-Hee
    Kim, Sukjin
    JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE, 2024, 24 (05) : 399 - 409
  • [10] A Gate-Grounded NMOS-Based Dual-Directional ESD Protection With High Holding Voltage for 12V Application
    Do, Kyoung-Il
    Song, Bo-Bae
    Koo, Yong-Seo
    IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY, 2020, 20 (04) : 716 - 722