This paper reports a tunable low triggering voltage, dual-directional SCR ESD protection structure in CMOS for RF ICs. A new embedded gate-coupling technique is used to reduce and adjust its triggering voltage. Experiment shows a low discharging resistance of similar to 0.26 Omega, low leakage current of similar to 0.19nA, low parasitic capacitance of similar to 150fF and ultra fast response time of similar to 100pS. This structure achieves ESD protection of >9.20kV HBM and >500V CDM for a 90 mu m device. A high ESD protection to Si ratio of ESDV similar to 8.17V/mu m(2) is obtained for RF IC applications.
机构:
Engineering Research Center of IoT Technology Applications (Ministry of Education), Department of Electronic Engineering, Jiangnan University, WuxiEngineering Research Center of IoT Technology Applications (Ministry of Education), Department of Electronic Engineering, Jiangnan University, Wuxi
Xu Q.
Liang H.
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Engineering Research Center of IoT Technology Applications (Ministry of Education), Department of Electronic Engineering, Jiangnan University, WuxiEngineering Research Center of IoT Technology Applications (Ministry of Education), Department of Electronic Engineering, Jiangnan University, Wuxi
Liang H.
Gu X.
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Engineering Research Center of IoT Technology Applications (Ministry of Education), Department of Electronic Engineering, Jiangnan University, WuxiEngineering Research Center of IoT Technology Applications (Ministry of Education), Department of Electronic Engineering, Jiangnan University, Wuxi
机构:
Samsung Elect Co Ltd, Design Enablement, Samsung Foundry, Hwaseong Si 18448, Gyeonggi Do, South KoreaSamsung Elect Co Ltd, Design Enablement, Samsung Foundry, Hwaseong Si 18448, Gyeonggi Do, South Korea
Do, Kyoung-Il
Jung, Jin-Woo
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Samsung Elect Co Ltd, Design Enablement, Samsung Foundry, Hwaseong Si 18448, Gyeonggi Do, South KoreaSamsung Elect Co Ltd, Design Enablement, Samsung Foundry, Hwaseong Si 18448, Gyeonggi Do, South Korea
Jung, Jin-Woo
Song, Jooyoung
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Samsung Elect Co Ltd, Design Enablement, Samsung Foundry, Hwaseong Si 18448, Gyeonggi Do, South KoreaSamsung Elect Co Ltd, Design Enablement, Samsung Foundry, Hwaseong Si 18448, Gyeonggi Do, South Korea
Song, Jooyoung
Jeon, Chan-Hee
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Samsung Elect Co Ltd, Design Enablement, Samsung Foundry, Hwaseong Si 18448, Gyeonggi Do, South KoreaSamsung Elect Co Ltd, Design Enablement, Samsung Foundry, Hwaseong Si 18448, Gyeonggi Do, South Korea
机构:
Hunan Normal Univ, Sch Phys & Elect, Changsha 410081, Peoples R China
Coll Hunan Prov, Key Lab Phys & Devices Post Moore Era, Changsha 410081, Peoples R ChinaHunan Normal Univ, Sch Phys & Elect, Changsha 410081, Peoples R China
Liu, Yujie
Wang, Yang
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Peking Univ, Sch Integrated Circuits, Beijing 100091, Peoples R ChinaHunan Normal Univ, Sch Phys & Elect, Changsha 410081, Peoples R China
Wang, Yang
Yang, Jian
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机构:
Hunan Normal Univ, Sch Phys & Elect, Changsha 410081, Peoples R China
Coll Hunan Prov, Key Lab Phys & Devices Post Moore Era, Changsha 410081, Peoples R ChinaHunan Normal Univ, Sch Phys & Elect, Changsha 410081, Peoples R China
Yang, Jian
Jin, Xiangliang
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机构:
Hunan Normal Univ, Sch Phys & Elect, Changsha 410081, Peoples R China
Coll Hunan Prov, Key Lab Phys & Devices Post Moore Era, Changsha 410081, Peoples R ChinaHunan Normal Univ, Sch Phys & Elect, Changsha 410081, Peoples R China