Printing nanoparticle building blocks from the gas phase using nanoxerography

被引:52
作者
Barry, CR [1 ]
Lwin, NZ [1 ]
Zheng, W [1 ]
Jacobs, HO [1 ]
机构
[1] Univ Minnesota, Dept Elect & Comp Engn, Minneapolis, MN 55455 USA
关键词
D O I
10.1063/1.1637143
中图分类号
O59 [应用物理学];
学科分类号
摘要
This letter reports on the electrostatic driven self-assembly of nanoparticles onto charged surface areas (receptors) from the gas phase for nanoparticle based device fabrication. The charged areas were generated by a parallel technique that uses a flexible, conductive electrode to pattern electrons and holes in a thin film electret. Samples, 1 cm(2) in size, were patterned with charge in 10 s with 100 nm scale resolution. Charge based receptors, 100 nmx100 nm in size, contained similar to100 elementary charges. A transparent particle assembly module was designed to direct and monitor the assembly of metallic nanoparticles at a resolution of 100 nm, which is similar to3 orders of magnitude greater than the resolution of existing xerographic printers. (C) 2003 American Institute of Physics.
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收藏
页码:5527 / 5529
页数:3
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