Developmental long-trace profiler using optimally aligned mirror-based pentaprism

被引：22

作者：

Barber, Samuel K. ^{[1
]}

Morrison, Gregory Y. ^{[1
]}

Yashchuk, Valeriy V. ^{[1
]}

Gubarev, Mikhail V. ^{[2
]}

Geckeler, Ralf D. ^{[3
]}

Buchheim, Jana ^{[4
]}

Siewert, Frank ^{[4
]}

Zeschke, Thomas ^{[4
]}

机构：

[1] Univ Calif Berkeley, Lawrence Berkeley Lab, Adv Light Source, Berkeley, CA 94720 USA

[2] NASA, George C Marshall Space Flight Ctr, Huntsville, AL 35812 USA

[3] Phys Tech Bundesanstalt, D-38116 Braunschweig, Germany

[4] Elekt Speicherring BESSY II, Helmholtz Zentrum Berlin Mat & Energie, D-12489 Berlin, Germany

来源：

OPTICAL ENGINEERING | 2011年 / 50卷 / 05期

关键词：

optical metrology; surface slope metrology; surface profilometer; long-trace profilers; developmental long-trace profilers; pentaprism; mirror-based pentaprism; alignment; deflectometry; OPTICS;

D O I：

10.1117/1.3572113

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A low-budget surface slope-measuring instrument, the developmental long-trace profiler (DLTP), was recently brought into operation at the Advanced Light Source Optical Metrology Laboratory. The instrument is based on a precisely calibrated autocollimator and a movable pentaprism. The capability of the DLTP to achieve submicroradian surface slope metrology has been verified via cross-comparison measurements to other high-performance slope-measuring instruments when measuring the same high-quality test optics. Further improvement of the DLTP is achieved by replacing the existing bulk pentaprism with a specially designed mirror-based pentaprism, which offers the possibility to eliminate systematic errors introduced by inhomogeneity of the optical material and fabrication imperfections of a bulk pentaprism. We provide the details of the mirror-based pentaprism design and describe an original experimental procedure for precision mutual alignment of the mirrors. The algorithm of the alignment procedure and its efficiency are verified with rigorous ray-tracing simulations. Results of measurements of a spherically curved test mirror and a flat test mirror using the original bulk pentaprism are compared to measurements using the new mirror-based pentaprism, demonstrating the improved performance. (C) 2011 Society of Photo-Optical Instrumentation Engineers (SPIE). [DOI: 10.1117/1.3572113]

引用

页数：10

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