Process Dependence of Proton-Induced Degradation in GaN HEMTs

被引:94
作者
Roy, Tania [1 ]
Zhang, En Xia [1 ]
Puzyrev, Yevgeniy S. [2 ]
Fleetwood, Daniel M. [1 ]
Schrimpf, Ronald D. [1 ]
Choi, Bo K. [1 ]
Hmelo, Anthony B. [2 ]
Pantelides, Sokrates T. [2 ]
机构
[1] Vanderbilt Univ, Dept Elect Engn & Comp Sci, Nashville, TN 37235 USA
[2] Vanderbilt Univ, Dept Phys & Astron, Nashville, TN 37235 USA
基金
美国国家科学基金会;
关键词
1/f noise; AlGaN/GaN; degradation; HEMT; proton; LOW-FREQUENCY NOISE; POWER PERFORMANCE; 1/F NOISE; TRANSISTOR;
D O I
10.1109/TNS.2010.2073720
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The 1.8-MeV proton radiation responses are compared for AlGaN/GaN HEMTs grown under Ga-rich, N-rich, and NH3-rich conditions. The NH3-rich devices are more susceptible to proton irradiation than the Ga-rich and N-rich devices. The 1/f noise of the devices increases with increasing fluence. Density functional theory calculations show that N vacancies and Ga-N divacancies lead to enhanced noise in these devices.
引用
收藏
页码:3060 / 3065
页数:6
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