Process Dependence of Proton-Induced Degradation in GaN HEMTs

被引:94
作者
Roy, Tania [1 ]
Zhang, En Xia [1 ]
Puzyrev, Yevgeniy S. [2 ]
Fleetwood, Daniel M. [1 ]
Schrimpf, Ronald D. [1 ]
Choi, Bo K. [1 ]
Hmelo, Anthony B. [2 ]
Pantelides, Sokrates T. [2 ]
机构
[1] Vanderbilt Univ, Dept Elect Engn & Comp Sci, Nashville, TN 37235 USA
[2] Vanderbilt Univ, Dept Phys & Astron, Nashville, TN 37235 USA
基金
美国国家科学基金会;
关键词
1/f noise; AlGaN/GaN; degradation; HEMT; proton; LOW-FREQUENCY NOISE; POWER PERFORMANCE; 1/F NOISE; TRANSISTOR;
D O I
10.1109/TNS.2010.2073720
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The 1.8-MeV proton radiation responses are compared for AlGaN/GaN HEMTs grown under Ga-rich, N-rich, and NH3-rich conditions. The NH3-rich devices are more susceptible to proton irradiation than the Ga-rich and N-rich devices. The 1/f noise of the devices increases with increasing fluence. Density functional theory calculations show that N vacancies and Ga-N divacancies lead to enhanced noise in these devices.
引用
收藏
页码:3060 / 3065
页数:6
相关论文
共 21 条
[1]   Gate-voltage dependence of low-frequency noise in GaN/AlGaN heterostructure field-effect transistors [J].
Balandin, A .
ELECTRONICS LETTERS, 2000, 36 (10) :912-913
[2]   Annealing behavior of a proton irradiated AlxGa1-xN/GaN high electron mobility transistor grown by MBE [J].
Cai, SJ ;
Tang, YS ;
Li, R ;
Wei, YY ;
Wong, L ;
Chen, YL ;
Wang, KL ;
Chen, M ;
Zhao, YF ;
Schrimpf, RD ;
Keay, JC ;
Galloway, KF .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2000, 47 (02) :304-307
[3]   Structural and morphological properties of GaN buffer layers grown by ammonia molecular beam epitaxy on SiC substrates for AlGaN/GaN high electron mobility transistors [J].
Corrion, A. L. ;
Poblenz, C. ;
Wu, F. ;
Speck, J. S. .
JOURNAL OF APPLIED PHYSICS, 2008, 103 (09)
[4]   1/F NOISE AND RADIATION EFFECTS IN MOS DEVICES [J].
FLEETWOOD, DM ;
MEISENHEIMER, TL ;
SCHOFIELD, JH .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1994, 41 (11) :1953-1964
[5]   EXPERIMENTAL STUDIES ON 1-F NOISE [J].
HOOGE, FN ;
KLEINPENNING, TGM ;
VANDAMME, LKJ .
REPORTS ON PROGRESS IN PHYSICS, 1981, 44 (05) :479-532
[6]  
Hu X., 2003, IEEE T NUCL SCI, V50, P1801
[7]   Electrostatic Mechanisms Responsible for Device Degradation in Proton Irradiated AlGaN/AIN/GaN HEMTs [J].
Kalavagunta, A. ;
Touboul, A. ;
Shen, L. ;
Schrimpf, R. D. ;
Reed, R. A. ;
Fleetwood, D. M. ;
Jain, R. K. ;
Mishra, U. K. .
IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 2008, 55 (04) :2106-2112
[8]   LOW-FREQUENCY NOISE IN MODERN BIPOLAR-TRANSISTORS - IMPACT OF INTRINSIC TRANSISTOR AND PARASITIC SERIES RESISTANCES [J].
KLEINPENNING, TGM .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1994, 41 (11) :1981-1991
[9]   X- and Ka-band power performance of AlGaN/GaN HEMTs grown by ammonia-MBE [J].
Pei, Y. ;
Poblenz, C. ;
Corrion, A. L. ;
Chu, R. ;
Shen, L. ;
Speck, J. S. ;
Mishra, U. K. .
ELECTRONICS LETTERS, 2008, 44 (09) :598-+
[10]   1/F NOISE IN MODFETS AT LOW DRAIN BIAS [J].
PERANSIN, JM ;
VIGNAUD, P ;
RIGAUD, D ;
VANDAMME, LKJ .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1990, 37 (10) :2250-2253