Structure and Properties of CrN/TiN Superlattice Coatings Deposited by the Combined Deep Oscillation Magnetron Sputtering

被引：0
作者：
Ou Yixiang [1 ,2 ]
Pan Wei [1 ]
Lei Mingkai [2 ]
机构：
[1] Tsinghua Univ, State Key Lab New Ceram & Fine Proc, Beijing 100084, Peoples R China
[2] Dalian Univ Technol, Surface Engn Lab, Dalian 116024, Peoples R China
来源：
RARE METAL MATERIALS AND ENGINEERING | 2018年 / 47卷
关键词：
CrN/TiN superlattice coatings; deep oscillation magnetron sputtering; pulsed dc magnetron sputtering; wear; corrosion;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
2 mu m-thick CrN/TiN superlattice coatings with modulated period of 6.3 nm were deposited by the combined deep oscillation magnetron sputtering (DOMS) and pulsed dc magnetron sputtering (PDCMS), and single PDCMS. Microstructure of the coatings was characterized by XRD, SEM and TEM. Mechanical and tribological properties of the coatings were analyzed by nanoindenter, scratch test and ball-on-disc tribometer. Anode polarization tests in 3.5 wt% NaCl aqueous solution were used to evaluate corrosion resistance of the coatings. Compared with the coatings deposited by single PDCMS, the coatings deposited by combined DOMS+PDCMS show higher mechanical properties, endurable wear resistance and antifriction properties and corrosion resistance due to the improved structure.
引用
收藏
页码：330 / 334
页数：5
相关论文
共 10 条
[1]   MODEL OF SUPERLATTICE YIELD STRESS AND HARDNESS ENHANCEMENTS [J].
CHU, X ;
BARNETT, SA .
JOURNAL OF APPLIED PHYSICS, 1995, 77 (09) :4403-4411
[2]   Recent progress in large scale manufacturing of multilayer/superlattice hard coatings [J].
Hovsepian, PE ;
Lewis, DB ;
Münz, WD .
SURFACE & COATINGS TECHNOLOGY, 2000, 133 :166-175
[3]   On the significance of the H/E ratio in wear control:: a nanocomposite coating approach to optimised tribological behaviour [J].
Leyland, A ;
Matthews, A .
WEAR, 2000, 246 (1-2) :1-11
[4]   Recent advances in modulated pulsed power magnetron sputtering for surface engineering [J].
Lin, Jianliang ;
Sproul, William D. ;
Moore, John J. ;
Wu, Zhili ;
Lee, Sabrina ;
Chistyakov, Roman ;
Abraham, Bassam .
JOM, 2011, 63 (06) :48-58
[5]   CrN/AlN superlattice coatings synthesized by pulsed closed field unbalanced magnetron sputtering with different CrN layer thicknesses [J].
Lin, Jianliang ;
Moore, John J. ;
Mishra, Brajendra ;
Pinkas, Malki ;
Zhang, Xuhai ;
Sproul, William D. .
THIN SOLID FILMS, 2009, 517 (20) :5798-5804
[6]   Toughness of hard nanostructured ceramic thin films [J].
Musil, J. ;
Jirout, M. .
SURFACE & COATINGS TECHNOLOGY, 2007, 201 (9-11) :5148-5152
[7]   Structure, adhesion and corrosion behavior of CrN/TiN superlattice coatings deposited by the combined deep oscillation magnetron sputtering and pulsed dc magnetron sputtering [J].
Ou, Y. X. ;
Lin, J. ;
Tong, S. ;
Sproul, W. D. ;
Lei, M. K. .
SURFACE & COATINGS TECHNOLOGY, 2016, 293 :21-27
[8]   Mechanical and tribological properties of CrN/TiN multilayer coatings deposited by pulsed dc magnetron sputtering [J].
Ou, Y. X. ;
Lin, J. ;
Che, H. L. ;
Sproul, W. D. ;
Moore, J. J. ;
Lei, M. K. .
SURFACE & COATINGS TECHNOLOGY, 2015, 276 :152-159
[9]   Wear and corrosion resistance of CrN/TiN superlattice coatings deposited by a combined deep oscillation magnetron sputtering and pulsed dc magnetron sputtering [J].
Ou, Y. X. ;
Lin, J. ;
Tong, S. ;
Che, H. L. ;
Sproul, W. D. ;
Lei, M. K. .
APPLIED SURFACE SCIENCE, 2015, 351 :332-343
[10]   New routes in the preparation of mechanically hard films [J].
Sproul, WD .
SCIENCE, 1996, 273 (5277) :889-892
1