Localized Liquid-Phase Synthesis of Porous SnO2 Nanotubes on MEMS Platform for Low-Power, High Performance Gas Sensors

被引：90

作者：

Cho, Incheol ^{[1
]}

Kang, Kyungnam ^{[1
]}

Yang, Daejong ^{[2
]}

Yun, Jeonghoon ^{[1
]}

Park, Inkyu ^{[1
]}

机构：

[1] Korea Adv Inst Sci & Technol, Dept Mech Engn, 291 Daehak Ro, Daejeon 305701, South Korea

[2] CALTECH, Dept Med Engn, Pasadena, CA 91125 USA

来源：

ACS APPLIED MATERIALS & INTERFACES | 2017年 / 9卷 / 32期

基金：

新加坡国家研究基金会;

关键词：

metal oxide; gas sensor; MEMS; tin oxide (SnO2); nanowire; nanotube; liquid-phase deposition; THIN-FILM; SURFACE MODIFICATION; NANOWIRE ARRAY; TEMPERATURE; NANOSTRUCTURES; DEPOSITION; NANOMATERIALS; INTEGRATION; HYDROGEN; DESIGN;

D O I：

10.1021/acsami.7b04850

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

We have developed highly sensitive, low-power gas sensors through the novel integration method of porous SnO2 nanotubes (NTs) on a micro-electromechanical-systems (MEMS) platform. As a template material, ZnO nanowires (NWs) were directly synthesized on beam-shaped, suspended microheaters through an in situ localized hydrothermal reaction induced by local thermal energy around the Joule heated area. Also, the liquid-phase deposition process enabled the formation of a porous SnO2 thin film on the surface of ZnO NWs and simultaneous etching of the ZnO core, eventually to generate porous SnO2 NTs. Because of the localized synthesis of SnO2 NTs on the suspended microheater, very low power for the gas sensor operation (<6 mW) has been realized. Moreover, the sensing performance (e.g., sensitivity and response time) of synthesized SnO2 NTs was dramatically enhanced compared to that of ZnO NWs. In addition, the sensing performance was further improved by forming SnO2-ZnO hybrid nanostructures due to the heterojunction effect.

引用

页码：27111 / 27119

页数：9

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