Synthesis of nano-crystalline diamond film in hot filament chemical vapour deposition by adding Ar

被引：19
|
作者：
Zhang, YF
Zhang, F
Gao, QJ [1 ]
Yu, DP
Peng, XF
Lin, XD
机构：
[1] Peking Univ, Dept Phys, Beijing 100871, Peoples R China
[2] Beijing Inst Powder Met, Beijing 100078, Peoples R China
来源：
CHINESE PHYSICS LETTERS | 2001年 / 18卷 / 02期
关键词：
D O I：
10.1088/0256-307X/18/2/345
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
Nano-crystalline diamond films are successfully deposited on silicon substrates via. the hot filament chemical vapour deposition process using a CH4/H-2/Ar gas mixture. The as-grown films are analysed by using field emission scanning electron microscopy, micro-Raman spectroscopy and x-ray diffraction. These results show that the films consist of nano-diamond grains with sizes ranging from 10 to 100 nm, and argon is an important element in the formation of nano-crystalline diamonds.
引用
收藏
页码：286 / 288
页数：3
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