共 42 条
[1]
MICROFABRICATION OF CANTILEVER STYLI FOR THE ATOMIC FORCE MICROSCOPE
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1990, 8 (04)
:3386-3396
[3]
HIGH-RESOLUTION PATTERNING OF SILICON BY SELECTIVE GALLIUM DOPING
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1983, 1 (04)
:1059-1061
[6]
FABRICATION OF ARRAYS OF NANOMETER-SIZE TEST STRUCTURES FOR SCANNING PROBE MICROSCOPE TIPS CHARACTERIZATION
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1994, 12 (06)
:3681-3684
[7]
INTERPRETATION ISSUES IN FORCE MICROSCOPY
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1991, 9 (04)
:2548-2556
[8]
CHEN W, 1993, MATER RES SOC S P, V279, P559
[10]
FORCE PROBE CHARACTERIZATION USING SILICON 3-DIMENSIONAL STRUCTURES FORMED BY FOCUSED ION-BEAM LITHOGRAPHY
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1994, 12 (06)
:3571-3575