Effects of gas composition on asynchronous error motion in externally pressurized spindles

被引：8

作者：

Marsh, Eric R. ^{[1
]}

Arneson, David A. ^{[2
]}

Liebers, Melvin J. ^{[2
]}

Olson, Mike W. ^{[2
]}

机构：

[1] Penn State Univ, Dept Mech Engn, Coll Engn, Machine Dynam Res Lab, University Pk, PA 16802 USA

[2] Profess Instrumental Co, Hopkins, MN 55343 USA

来源：

PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY | 2008年 / 32卷 / 02期

关键词：

spindle metrology; spindle error motion;

D O I：

10.1016/j.precisioneng.2007.04.007

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Stable, externally pressurized aerostatic spindles exhibit picometer-level vibration as a result of the interaction of the high-pressure working fluid and its path through a spindle's compensation features (e.g., grooves, orifices, pockets, etc.). This vibration presents a challenge as end users seek the lowest possible asynchronous error motion in manufacturing, metrology and data storage applications. This technical brief describes experimental testing to quantify this low-level vibration and its significant variation with both supply gas composition and pressure. Of the gases tested, helium and neon generate the lowest vibration while other gases including air lead to an order of magnitude higher vibration. Vibration levels with carbon dioxide and nitrous oxide are an additional order of magnitude higher. At present, the root cause of the vibration amplitude dependence on supply gas composition is unknown although kinematic viscosity and mean free path length correlate well with the results presented here. (C) 2007 Elsevier Inc. All rights reserved.

引用

页码：143 / 147

页数：5