Design and experimental characterization of the chevron-type bi-stable actuator for optical switch applications

被引：2
|
作者：
Hwang, IH [1 ]
Shim, YS [1 ]
Kwon, HN [1 ]
Lee, JH [1 ]
机构：
[1] K JIST, Dept Mechatron, Buk Gu, Gwangju 500712, South Korea
来源：
2003 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS | 2003年
关键词：
bi-stable; MEMS; microactuator; buckling; latch-up; hinge spring; optical switch;
D O I：
10.1109/OMEMS.2003.1233503
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：135 / 136
页数：2
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