Research on SOI-based micro-resonator devices

被引：0

作者：

Xiao, Xi ^{[1
]}

Xu, Haihua ^{[1
]}

Hu, Yingtao ^{[1
]}

Zhou, Liang ^{[1
]}

Xiong, Kang ^{[1
]}

Li, Zhiyong ^{[1
]}

Li, Yuntao ^{[1
]}

Fan, Zhongchao ^{[2
]}

Han, Weihua ^{[2
]}

Yu, Yude ^{[1
]}

Yu, Jinzhong ^{[1
]}

机构：

[1] Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, POB 912, Beijing 100083, Peoples R China

[2] Chinese Acad Sci, Semicond Integrat Technol Engn, Inst Semicond, Beijing 100083, Peoples R China

来源：

OPTOELECTRONIC DEVICES AND INTEGRATION III | 2010年 / 7847卷

基金：

中国国家自然科学基金;

关键词：

silicon photonics; silicon-on-insulator; microring and microdisk resonators; cascaded microring; optical filters; modulators and switches; SILICON; COMPACT; FILTERS;

D O I：

10.1117/12.871719

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

SOI (silicon-on-insulator)-based micro-resonator is the key building block of silicon photonics, which is considered as a promising solution to alleviate the bandwidth bottleneck of on-chip interconnects. Silicon-based sub-micron waveguide, microring and microdisk devices are investigated in Institute of Semiconductors, Chinese Academy of Sciences. The main progress in recent years is presented in this talk, such as high Q factor single mode microdisk filters, compact third-order microring filters with the through/drop port extinctions to be similar to 30/40 dB, fast microring electro-optical switches with the switch time of < 400 ps and crosstalk < -23 dB, and > 10 Gbit/s high speed microring modulators.

引用

页数：8

共 16 条

[1] Fabrication of add-drop filters based on frequency-matched microring resonators [J].