Integration of crossed anisotropy magnetic core into toroidal thin-film inductors

被引：22

作者：

Frommberger, M ^{[1
]}

Schmutz, C

Tewes, M

McCord, J

Hartung, W

Losehand, R

Quandt, E

机构：

[1] Stiftung Caesar, AG Smart Mat, D-53175 Bonn, Germany

[2] Stiftung Caesar, Sensor Syst Grp, D-53175 Bonn, Germany

[3] Inst Festkorper & Werkstoffforsch Dresden, D-01069 Dresden, Germany

[4] Infineon Technol AG, D-81541 Munich, Germany

来源：

IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES | 2005年 / 53卷 / 06期

关键词：

anisotropy; inductor; magnetic devices; magnetic cores; permeability;

D O I：

10.1109/TMTT.2005.848753

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A new approach to RF thin-film inductors with an integrated magnetic core has been investigated. A toroidal inductor design was realized in thin-film technology aiming at small-signal applications in the frequency range from 10 MHz to 1 GHz. The magnetic core-consists of a multilayer of sputter deposited soft magnetic FeCoBSi. The individual magnetic films were deposited in a way to realize a crossed magnetic anisotropy in the core. High-frequency measurements of the multilayers already illustrated the advantages of the unique magnetic geometry. The influence and benefit of such a magnetic core on the toroid microinductor is discussed. The results show that such crossed anisotropy microinductors are a very promising alternative to common planar spiral inductors in the RF range.

引用

页码：2096 / 2100

页数：5

共 14 条

[1] Effect of patterned magnetic shields on high-frequency integrated inductors [J].

Crawford, AM ;

Wang, SX .

IEEE TRANSACTIONS ON MAGNETICS, 2004, 40 (04) :2017-2019

[2] High-frequency microinductors with amorphous magnetic ground planes [J].

Crawford, AM ;

Gardner, D ;

Wang, SX .

IEEE TRANSACTIONS ON MAGNETICS, 2002, 38 (05) :3168-3170

[3] PERMEABILITY OF NARROW PERMALLOY STRIPES [J].

FENG, JSY ;

THOMPSON, DA .

IEEE TRANSACTIONS ON MAGNETICS, 1977, 13 (05) :1521-1523

[4]

FERGEN I, 2003, FZKA6796 FORSCH KARL

[5] High-frequency properties of FeCoSiB, thin films with crossed anisotropy [J].

Frommberger, M ;

McCord, J ;

Quandt, E .

IEEE TRANSACTIONS ON MAGNETICS, 2004, 40 (04) :2703-2705

[6]

FROMMBERGER M, 2004, 34 EUR MICR C AMST N

[7]

Gardner D, 2001, IEEE INT INTERC TECH, P101, DOI 10.1109/IITC.2001.930029

[8] Analysis of current distribution in magnetic film inductors [J].

Gromov, A ;

Korenivski, V ;

Haviland, D ;

van Dover, RB .

JOURNAL OF APPLIED PHYSICS, 1999, 85 (08) :5202-5204

[9] Assessment of ferromagnetic integrated inductors for SI-technology [J].

Rejaei, B ;

Vroubel, M ;

Zhuang, Y ;

Burghartz, JN .

2003 TOPICAL MEETING ON SILICON MONOLITHIC INTEGRATED CIRCUITS IN RF SYSTEMS, DIGEST OF PAPERS, 2003, :100-103

[10] MICROMAGNETICS OF LAMINATED PERMALLOY-FILMS [J].

SLONCZEWSKI, JC ;

PETEK, B ;

ARGYLE, BE .

IEEE TRANSACTIONS ON MAGNETICS, 1988, 24 (03) :2045-2054

← 1 2 →