Manufacturing pinhole arrays for X-ray source diagnostics using LIGA

被引：3

作者：

Gerner, M

Holldack, K

Luttge, R

Schmidt, M

机构：

[1] BESSY GmbH, D-14195 Berlin, Germany

[2] IMM, D-55129 Mainz, Germany

来源：

MICROSYSTEM TECHNOLOGIES | 1998年 / 4卷 / 04期

关键词：

Coherence; Synchrotron Radiation; Storage Ring; Ring Current; Gold Foil;

D O I：

10.1007/s005420050127

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The manufacturing of pinhole arrays with diameters 10 mu m up to 60 mu m in 100-300 mu m gold foils is described using LIGA. These structures are used to characterize the electron beam in a storage ring by means of the emitted synchrotron radiation. The source inside the bending magnet 13 at BESSY I (single bunch mode, 70 mA ring current, pinholes diameter 60 mu m) is (448 +/- 40) mu m in height and (768 +/- 40)mu m in horizontal width. For BESSY II pinholes with diameter 10-20 mu m will be used utilizing bending magnet radiation (resolution similar to 10 mu m), single pinholes with 1-5 mu m in diameter are dedicated to insertion device characterization (coherence).

引用

页码：184 / 186

页数：3