Multilayer strained Si/SiGe structures: fabrication problems, interface characteristics, and physical properties

The objectives of this investigation air structural and physical characteristics of the n-Si1-xGex/n(p)-Si heterojunction under strong elastic deformation of Si1-xGex layers which gives rise to misfit dislocations in the heteroboundary region; the factors playing the main role information of the band structure of the system; the use of transmission electron microscopy and optical methods for determination of the phenomena connected with misfit dislocations in the grown epitaxial structure; the electrical characteristics of diode structure and the process of election-hole recombination via dislocation states in a heterojunction.