A model for friction in atomic force microscopy

被引：0
|
作者：
Salapaka, S [1 ]
Dahleh, M [1 ]
机构：
[1] Univ Calif Santa Barbara, Dept Mech & Environm Engn, Santa Barbara, CA 93106 USA
来源：
PROCEEDINGS OF THE 2000 AMERICAN CONTROL CONFERENCE, VOLS 1-6 | 2000年
关键词：
mass-spring-damper model; JKR theory; AFMs; friction; control; tracking; stick-slip; differential inclusions;
D O I：
暂无
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
A mass-spring-damper model has been presented to describe the cantilever-sample dynamics in Atomic Force Microscope (AFM). Friction has been incorporated in this model by using Johnson-Kendall-Roberts (JKR) theory for elastic contacts. It has been validated by exhibiting some characteristic features (such as stick-slip behavior) observed in experiments with AFM. A control law has been designed so that the piezoelectric tube in an AFM moves in a desired manner inspite of the friction. Simulation results have been presented to illustrate the model and performance of the controllers.
引用
收藏
页码：2102 / 2107
页数：6
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