Characterization of structural effects in ferroelectric tunable capacitors using barium strontium titanate thin films

被引：2
|
作者：
Nakaiso, T. [1 ]
Takeshima, Y. [1 ]
Kageyama, K. [1 ]
Takagi, H. [1 ]
Sakabe, Y. [1 ]
机构：
[1] Murata Mfg Co Ltd, Kyoto 6178555, Japan
来源：
2007 SIXTEENTH IEEE INTERNATIONAL SYMPOSIUM ON THE APPLICATIONS OF FERROELECTRICS, VOLS 1 AND 2 | 2007年
关键词：
D O I：
10.1109/ISAF.2007.4393218
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We fabricated two types of ferroelectric tunable capacitors, which were metal- insulator- metal structure (MIM) and interdigital electrodes structure (IDE) using (Ba(0.7)Sr(0.3))TiO(3) (BST) thin films prepared by chemical solution decomposition (CSD) method. These films showed grained structure and crystalline properties were randomly oriented. Dielectric tunabilty of MIM structures was -52%/6V and that of IDE structures was -50%/15V, at 2GHz respectively. Quality factor of IDE structures was higher than that of MIM structures.
引用
收藏
页码：214 / 215
页数：2
相关论文
共 50 条
  • [31] Low voltage tunable barium strontium titanate thin film capacitors for RF and microwave applications
    Tombak, A
    Ayguavives, FT
    Maria, JP
    Stauf, GT
    Kingon, AI
    Mortazawi, A
    2000 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST, VOLS 1-3, 2000, : 1345 - 1348
  • [32] Tunable Low-Field Interdigitated Barium Strontium Titanate Capacitors
    Al Ahmad, Mahmoud
    Leclerc, G.
    Brunet, M.
    Mauran, N.
    Bary, L.
    Plana, R.
    2007 ASIA PACIFIC MICROWAVE CONFERENCE, VOLS 1-5, 2007, : 1895 - 1898
  • [33] Ba titanate and barium/strontium titanate thin films from hydroxide precursors: Preparation and ferroelectric behavior
    Paik, DS
    Rao, AVP
    Komarneni, S
    JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY, 1997, 10 (02) : 213 - 220
  • [34] Ba Titanate and Barium/Strontium Titanate Thin Films from Hydroxide Precursors: Preparation and Ferroelectric Behavior
    Dong Soo Paik
    A.V. Prasada Rao
    S. Komarneni
    Journal of Sol-Gel Science and Technology, 1997, 10 : 213 - 220
  • [35] Design and implementation of combline bandpass tunable filter using barium-strontium-titanate thin-film capacitors
    Liu, Lang
    Chen, Hongwei
    Zhang, Jihua
    Tan, Yu
    Wang, Wenjun
    Yang, Chuanren
    INTEGRATED FERROELECTRICS, 2017, 183 (01) : 126 - 135
  • [36] Synthesis and characterization of strontium barium niobate (SBN) ferroelectric thin films
    Mendes, RG
    Araújo, EB
    Klein, H
    Eiras, JA
    BOLETIN DE LA SOCIEDAD ESPANOLA DE CERAMICA Y VIDRIO, 1999, 38 (05): : 455 - 457
  • [37] Residual stress effects in doped barium strontium titanate thin films
    Nothwang, WD
    Cole, MW
    Hubbard, C
    Ngo, E
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2005, 152 (03) : F37 - F43
  • [38] Comparison of structural, microstructural, and electrical analyses of barium strontium titanate thin films
    Suherman, P. M.
    Tse, Y. Y.
    Jackson, T. J.
    Bouyanfif, H.
    El Marssi, M.
    Hriljac, J. A.
    Jones, I. P.
    Lancaster, M. J.
    JOURNAL OF APPLIED PHYSICS, 2009, 105 (06)
  • [39] Structural and electrical investigations of ferroelectric lead strontium titanate thin films and ceramics
    Jain, M
    Bhattacharya, P
    Yuzyuk, YI
    Katiyar, RS
    Bhalla, AS
    FERROELECTRIC THIN FILMS XII, 2004, 784 : 225 - 230
  • [40] Preparation and characterization of barium strontium titanate thin films by chemical solution deposition
    Borderon, C.
    Averty, D.
    Seveno, R.
    Gundel, H. W.
    FERROELECTRICS, 2008, 362 : 1 - 7
12345