Characterization of structural effects in ferroelectric tunable capacitors using barium strontium titanate thin films

被引：2
|
作者：
Nakaiso, T. [1 ]
Takeshima, Y. [1 ]
Kageyama, K. [1 ]
Takagi, H. [1 ]
Sakabe, Y. [1 ]
机构：
[1] Murata Mfg Co Ltd, Kyoto 6178555, Japan
来源：
2007 SIXTEENTH IEEE INTERNATIONAL SYMPOSIUM ON THE APPLICATIONS OF FERROELECTRICS, VOLS 1 AND 2 | 2007年
关键词：
D O I：
10.1109/ISAF.2007.4393218
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We fabricated two types of ferroelectric tunable capacitors, which were metal- insulator- metal structure (MIM) and interdigital electrodes structure (IDE) using (Ba(0.7)Sr(0.3))TiO(3) (BST) thin films prepared by chemical solution decomposition (CSD) method. These films showed grained structure and crystalline properties were randomly oriented. Dielectric tunabilty of MIM structures was -52%/6V and that of IDE structures was -50%/15V, at 2GHz respectively. Quality factor of IDE structures was higher than that of MIM structures.
引用
收藏
页码：214 / 215
页数：2
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