Characterization of structural effects in ferroelectric tunable capacitors using barium strontium titanate thin films

被引：2
|
作者：
Nakaiso, T. [1 ]
Takeshima, Y. [1 ]
Kageyama, K. [1 ]
Takagi, H. [1 ]
Sakabe, Y. [1 ]
机构：
[1] Murata Mfg Co Ltd, Kyoto 6178555, Japan
来源：
2007 SIXTEENTH IEEE INTERNATIONAL SYMPOSIUM ON THE APPLICATIONS OF FERROELECTRICS, VOLS 1 AND 2 | 2007年
关键词：
D O I：
10.1109/ISAF.2007.4393218
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We fabricated two types of ferroelectric tunable capacitors, which were metal- insulator- metal structure (MIM) and interdigital electrodes structure (IDE) using (Ba(0.7)Sr(0.3))TiO(3) (BST) thin films prepared by chemical solution decomposition (CSD) method. These films showed grained structure and crystalline properties were randomly oriented. Dielectric tunabilty of MIM structures was -52%/6V and that of IDE structures was -50%/15V, at 2GHz respectively. Quality factor of IDE structures was higher than that of MIM structures.
引用
收藏
页码：214 / 215
页数：2
相关论文
共 50 条
  • [1] Switching time of planar ferroelectric capacitors using strontium titanate and barium strontium titanate films
    Kozyrev, AB
    Soldatenkov, OI
    Ivanov, AV
    TECHNICAL PHYSICS LETTERS, 1998, 24 (10) : 755 - 757
  • [2] Switching time of planar ferroelectric capacitors using strontium titanate and barium strontium titanate films
    A. B. Kozyrev
    O. I. Soldatenkov
    A. V. Ivanov
    Technical Physics Letters, 1998, 24 : 755 - 757
  • [3] Scaling Issues in Ferroelectric Barium Strontium Titanate Tunable Planar Capacitors
    Lam, Peter G.
    Haridasan, Vrinda
    Feng, Zhiping
    Steer, Michael B.
    Kingon, Angus I.
    Maria, Jon-Paul
    IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2012, 59 (02) : 198 - 204
  • [4] TUNABLE BARIUM STRONTIUM TITANATE THIN FILMS BY CSD
    Iwasaki, Dai
    Maruyama, Miho
    Sakamoto, Naonori
    Fu, Desheng
    Wakiya, Naoki
    Suzuki, Hisao
    ELECTROCERAMICS IN JAPAN XIII, 2010, 445 : 156 - 159
  • [5] DEVELOPMENT OF TUNABLE DEVICES USING BARIUM STRONTIUM TITANATE THIN FILMS
    Morito, K.
    Natsume, M.
    Sekiguchi, S.
    PROCEEDINGS OF THE 12TH PACIFIC RIM CONFERENCE ON CERAMIC AND GLASS TECHNOLOGY, 2018, 264 : 179 - 190
  • [6] Development of tunable devices using barium strontium titanate thin films
    Morito K.
    Natsume M.
    Sekiguchi S.
    2018, Wiley Blackwell (264): : 179 - 190
  • [7] Thermostable ferroelectric capacitors based on graded films of barium strontium titanate
    A. V. Tumarkin
    S. V. Razumov
    V. A. Volpyas
    A. G. Gagarin
    A. A. Odinets
    M. V. Zlygostov
    E. N. Sapego
    Technical Physics, 2017, 62 : 1592 - 1598
  • [8] Thermostable ferroelectric capacitors based on graded films of barium strontium titanate
    Tumarkin, A. V.
    Razumov, S. V.
    Volpyas, V. A.
    Gagarin, A. G.
    Odinets, A. A.
    Zlygostov, M. V.
    Sapego, E. N.
    TECHNICAL PHYSICS, 2017, 62 (10) : 1592 - 1598
  • [9] Characterization of sputtered barium strontium titanate and strontium titanate thin films
    Baumert, BA
    Chang, LH
    Matsuda, AT
    Tsai, TL
    Tracy, CJ
    Gregory, RB
    Fejes, PL
    Cave, NG
    Taylor, DJ
    Otsuki, T
    Fujii, E
    Hayashi, S
    Suu, K
    JOURNAL OF APPLIED PHYSICS, 1997, 82 (05) : 2558 - 2566
  • [10] Tunable RF filters using thin film barium strontium titanate based capacitors
    Tombak, A
    Ayguavives, FT
    Maria, JP
    Stauf, GT
    Kingon, AI
    Mortazawi, A
    2001 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST, VOLS 1-3, 2001, : 1453 - 1456
12345