X-ray pulse-shape analysis on bridge-type microcalorimeters with Ti-Au transition-edge sensors

被引:2
作者
Ukibe, M [1 ]
Tanaka, K [1 ]
Hirayama, F [1 ]
Mizuki, T [1 ]
Hiosaka, T [1 ]
Morooka, T [1 ]
Chinone, K [1 ]
Kawabe, U [1 ]
Nemoto, T [1 ]
Koyanagi, M [1 ]
Ohkubo, M [1 ]
Kobayashi, N [1 ]
机构
[1] Electrotech Lab, Tsukuba, Ibaraki 3058568, Japan
来源
X-RAY AND GAMMA-RAY INSTRUMENTATION FOR ASTRONOMY XI | 2000年 / 4140卷
关键词
microcalorimeter; superconducting transition-edge sensor; SiNx membrane; Ti/Au bilayer; SQUID; x-ray detector;
D O I
10.1117/12.409133
中图分类号
P1 [天文学];
学科分类号
0704 ;
摘要
We have fabricated a bridge-type structure for microcalorimeters with superconducting transition-edge sensors (TES). Instead of open space under a SiNx membrane in conventional TES microcalorimeters, the bridge-type calorimeters have a SiTx membrane floating on the Si substrate covered by a SiO2 layer with a small gap of 30-50 mum. The bridge-type structure ensures that the calorimeters are mechanically tough. In addition, the thermal conductance can easily be controlled by changing the width, length, or thickness of the SiNx bridge. The calorimeters, of which operating temperature is 0.43K, consist of a Ti/Au bilayer TES and an Au absorber. The x-ray events were read out by a DC-SQUID current amplifier with a 200-series array of SQUIDs placed on a 4.2 K stage. By analyzing the output pulse shapes, it has been found that the pulses are put into two categories. One has a fast rise time of similar to3 mus and two decay components with time constants of similar to 10 mus and about similar to 130 mus. Another one has a longer rise time of similar to 10 mus and a single decay component of similar to 130 mus. It is considered that the pulse shapes depend on the x-ray absorption positions and the heat-flow pass.
引用
收藏
页码:376 / 383
页数:8
相关论文
共 9 条
  • [1] DUMMER D, 1992, P 4 INT C SQUID, P482
  • [2] A Mo-Cu superconducting transition-edge microcalorimeter with 4.5 eV energy resolution at 6 keV
    Irwin, KD
    Hilton, GC
    Martinis, JM
    Deiker, S
    Bergren, N
    Nam, SW
    Rudman, DA
    Wollman, DA
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2000, 444 (1-2) : 184 - 187
  • [3] AN APPLICATION OF ELECTROTHERMAL FEEDBACK FOR HIGH-RESOLUTION CRYOGENIC PARTICLE-DETECTION
    IRWIN, KD
    [J]. APPLIED PHYSICS LETTERS, 1995, 66 (15) : 1998 - 2000
  • [4] Thermal-response time of superconducting transition-edge microcalorimeters
    Irwin, KD
    Hilton, GC
    Wollman, DA
    Martinis, JM
    [J]. JOURNAL OF APPLIED PHYSICS, 1998, 83 (08) : 3978 - 3985
  • [5] A SELF-BIASING CRYOGENIC PARTICLE DETECTOR UTILIZING ELECTROTHERMAL FEEDBACK AND A SQUID READOUT
    IRWIN, KD
    NAM, SW
    CABRERA, B
    CHUGG, B
    PARK, GS
    WELTY, RP
    MARTINIS, JM
    [J]. IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY, 1995, 5 (02) : 2690 - 2693
  • [6] Comparison of anisotropic etching properties between KOH and TMAH solutions
    Shikida, M
    Sato, K
    Tokoro, K
    Uchikawa, D
    [J]. MEMS '99: TWELFTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 1999, : 315 - 320
  • [7] TANAKAN T, UNPUB APPL PHYS LETT
  • [8] Thermal properties of calorimeters with Ti/Au transition-edge sensors on silicon nitride membranes
    Ukibe, M
    Tanaka, K
    Koyanagi, M
    Morooka, T
    Pressler, H
    Ohkubo, M
    Kobayashi, N
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2000, 444 (1-2) : 257 - 259
  • [9] High-resolution, energy-dispersive microcalorimeter spectrometer for X-ray microanalysis
    Wollman, DA
    Irwin, KD
    Hilton, GC
    Dulcie, LL
    Newbury, DE
    Martinis, JM
    [J]. JOURNAL OF MICROSCOPY-OXFORD, 1997, 188 : 196 - 223