Conductive Atomic Force Microscope Nanopatterning of Epitaxial Graphene on SiC(0001) in Ambient Conditions

被引：34

作者：

Alaboson, Justice M. P. ^{[1
,2
]}

Wang, Qing Hua ^{[1
]}

Kellar, Joshua A. ^{[1
]}

Park, Joohee ^{[1
]}

Elam, Jeffrey W. ^{[3
]}

Pellin, Michael J. ^{[2
]}

Hersam, Mark C. ^{[1
]}

机构：

[1] Northwestern Univ, Dept Mat Sci & Engn, Evanston, IL 60208 USA

[2] Argonne Natl Lab, Div Mat Sci, Argonne, IL 60439 USA

[3] Argonne Natl Lab, Div Energy Syst, Argonne, IL 60439 USA

来源：

ADVANCED MATERIALS | 2011年 / 23卷 / 19期

基金：

美国国家科学基金会;

关键词：

SCANNED PROBE OXIDATION; HYDROGEN-PASSIVATED SILICON; FIELD-INDUCED OXIDATION; INDUCED LOCAL OXIDATION; INERT ORGANIC-SOLVENTS; GRAPHITE OXIDE; SPACE-CHARGE; KINETICS; MECHANISM; MODEL;

D O I：

10.1002/adma.201100367

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Conductive atomic force microscope (cAFM) nanopatterning is demonstrated on epitaxial graphene on SiC (0001) under ambient conditions. Nanopatterning kinetics and chemistry suggest that ambient cAFM nanopatterning induces local oxidization with the surface, interface, and bulk layers of epitaxial graphene on SiC (0001) playing distinct roles in the depth profile of the final nanopatterned structure.

引用

页码：2181 / +

页数：5

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