Significant performance and stability improvement of low-voltage InZnO thin-film transistors by slight La doping

被引:31
作者
Cai, Wensi [1 ]
Li, Mengchao [1 ]
Li, Haiyun [1 ]
Qian, Qingkai [1 ]
Zang, Zhigang [1 ]
机构
[1] Chongqing Univ, Key Lab Optoelect Technol & Syst, Minist Educ, Chongqing 400044, Peoples R China
基金
中国博士后科学基金; 中国国家自然科学基金;
关键词
OXIDE GATE INSULATOR; TEMPERATURE;
D O I
10.1063/5.0100407
中图分类号
O59 [应用物理学];
学科分类号
摘要
Low-voltage, solution-processed oxide thin-film transistors (TFTs) have shown great potential in next-generation low-power, printable electronics. However, it is now still quite challenging to obtain low-voltage oxide TFTs with both high mobility and stability, especially for solution-processed ones. In this work, La-doped InZnO (IZO:La) channel for high performance and stable TFTs is developed using a simple solution process. The effects of La composition in IZO:La on the film and TFT performance are systematically investigated. It is confirmed that the incorporation of appropriate La could control the carrier concentration, improve the surface morphology, and passivate the oxygen-related defects, leading to a reduced trap density both at dielectric/channel interface and within the channel layer. As a result, the optimized TFTs with 1% La dopants exhibit the best overall performance, including a low operating voltage of 1 V, a high mobility of 14.5 cm(2)/V s, a low subthreshold swing of 109 mV/dec, a turn-on voltage close to 0 V, and negligible changes of performance under both positive and negative bias stresses. This work might support the development of all-solution-processed oxide TFT backplanes for battery-powered active-matrix displays. Published under an exclusive license by AIP Publishing.
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页数:7
相关论文
共 41 条
[11]   Combustion synthesis of electrospun LaIno nanofiber for high-performance field-effect transistors [J].
Chen, Qi ;
Li, Jun ;
Yang, Yaohua ;
Zhu, Wenqing ;
Zhang, Jianhua .
NANOTECHNOLOGY, 2019, 30 (42)
[12]   Solution-processed metal-oxide thin-film transistors: a review of recent developments [J].
Chen, Rongsheng ;
Lan, Linfeng .
NANOTECHNOLOGY, 2019, 30 (31)
[13]   Oxygen "Getter" Effects on Microstructure and Carrier Transport in Low Temperature Combustion-Processed a-InXZnO (X = Ga, Sc, Y, La) Transistors [J].
Hennek, Jonathan W. ;
Smith, Jeremy ;
Yan, Aiming ;
Kim, Myung-Gil ;
Zhao, Wei ;
Dravid, Vinayak P. ;
Facchetti, Antonio ;
Marks, Tobin J. .
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 2013, 135 (29) :10729-10741
[14]   Bias-Stress-Stable Solution-Processed Oxide Thin Film Transistors [J].
Jeong, Youngmin ;
Bae, Changdeuck ;
Kim, Dongjo ;
Song, Keunkyu ;
Woo, Kyoohee ;
Shin, Hyunjung ;
Cao, Guozhong ;
Moon, Jooho .
ACS APPLIED MATERIALS & INTERFACES, 2010, 2 (03) :611-615
[15]   High performance and high stability low temperature aqueous solution-derived Li-Zr co-doped ZnO thin film transistors [J].
Jung, Yangho ;
Yang, Wooseok ;
Koo, Chang Young ;
Song, Keunkyu ;
Moon, Jooho .
JOURNAL OF MATERIALS CHEMISTRY, 2012, 22 (12) :5390-5397
[16]   Origins of High Mobility and Low Operation Voltage of Amorphous Oxide TFTs: Electronic Structure, Electron Transport, Defects and Doping [J].
Kamiya, Toshio ;
Nomura, Kenji ;
Hosono, Hideo .
JOURNAL OF DISPLAY TECHNOLOGY, 2009, 5 (07) :273-288
[17]   The effect of La in InZnO systems for solution-processed amorphous oxide thin-film transistors [J].
Kim, Doo Na ;
Kim, Dong Lim ;
Kim, Gun Hee ;
Kim, Si Joon ;
Rim, You Seung ;
Jeong, Woong Hee ;
Kim, Hyun Jae .
APPLIED PHYSICS LETTERS, 2010, 97 (19)
[18]  
Kim MG, 2011, NAT MATER, V10, P382, DOI [10.1038/nmat3011, 10.1038/NMAT3011]
[19]   Stable and High-Performance Indium Oxide Thin-Film Transistor by Ga Doping [J].
Kim, Youn Goo ;
Kim, Taehun ;
Avis, Christophe ;
Lee, Seung-Hun ;
Jang, Jin .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2016, 63 (03) :1078-1084
[20]   Solution-processed amorphous hafnium-lanthanum oxide gate insulator for oxide thin-film transistors [J].
Ko, Jieun ;
Kim, Joohee ;
Park, Si Yun ;
Lee, Eungkyu ;
Kim, Kyongjun ;
Lim, Keon-Hee ;
Kim, Youn Sang .
JOURNAL OF MATERIALS CHEMISTRY C, 2014, 2 (06) :1050-1056