共 48 条
Graphene transport properties upon exposure to PMMA processing and heat treatments
被引:78
作者:

Gammelgaard, Lene
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Tech Univ Denmark, DTU Nanotech Dept Micro & Nanotechnol, DK-2800 Lyngby, Denmark Tech Univ Denmark, DTU Nanotech Dept Micro & Nanotechnol, DK-2800 Lyngby, Denmark

Caridad, Jose M.
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Tech Univ Denmark, DTU Nanotech Dept Micro & Nanotechnol, DK-2800 Lyngby, Denmark Tech Univ Denmark, DTU Nanotech Dept Micro & Nanotechnol, DK-2800 Lyngby, Denmark

Cagliani, Alberto
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Tech Univ Denmark, DTU Nanotech Dept Micro & Nanotechnol, DK-2800 Lyngby, Denmark
Tech Univ Denmark, CNG, DK-2800 Lyngby, Denmark Tech Univ Denmark, DTU Nanotech Dept Micro & Nanotechnol, DK-2800 Lyngby, Denmark

Mackenzie, David M. A.
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Tech Univ Denmark, DTU Nanotech Dept Micro & Nanotechnol, DK-2800 Lyngby, Denmark Tech Univ Denmark, DTU Nanotech Dept Micro & Nanotechnol, DK-2800 Lyngby, Denmark

Petersen, Dirch H.
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Tech Univ Denmark, DTU Nanotech Dept Micro & Nanotechnol, DK-2800 Lyngby, Denmark Tech Univ Denmark, DTU Nanotech Dept Micro & Nanotechnol, DK-2800 Lyngby, Denmark

Booth, Timothy J.
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机构:
Tech Univ Denmark, DTU Nanotech Dept Micro & Nanotechnol, DK-2800 Lyngby, Denmark
Tech Univ Denmark, CNG, DK-2800 Lyngby, Denmark Tech Univ Denmark, DTU Nanotech Dept Micro & Nanotechnol, DK-2800 Lyngby, Denmark

Boggild, Peter
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h-index: 0
机构:
Tech Univ Denmark, DTU Nanotech Dept Micro & Nanotechnol, DK-2800 Lyngby, Denmark
Tech Univ Denmark, CNG, DK-2800 Lyngby, Denmark Tech Univ Denmark, DTU Nanotech Dept Micro & Nanotechnol, DK-2800 Lyngby, Denmark
机构:
[1] Tech Univ Denmark, DTU Nanotech Dept Micro & Nanotechnol, DK-2800 Lyngby, Denmark
[2] Tech Univ Denmark, CNG, DK-2800 Lyngby, Denmark
来源:
基金:
新加坡国家研究基金会;
关键词:
graphene;
PMMA;
electrical devices;
heat treatments;
TRANSISTORS;
HYSTERESIS;
STRAIN;
D O I:
10.1088/2053-1583/1/3/035005
中图分类号:
T [工业技术];
学科分类号:
08 ;
摘要:
The evolution of graphene's electrical transport properties due to processing with the polymer polymethyl methacrylate (PMMA) and heat are examined in this study. The use of stencil (shadow mask) lithography enables fabrication of graphene devices without the usage of polymers, chemicals or heat, allowing us to measure the evolution of the electrical transport properties during individual processing steps from the initial as-exfoliated to the PMMA-processed graphene. Heating generally promotes the conformation of graphene to SiO2 and is found to play a major role for the electrical properties of graphene while PMMA residues are found to be surprisingly benign. In accordance with this picture, graphene devices with initially high carrier mobility tend to suffer a decrease in carrier mobility, while in contrast an improvement is observed for low carrier mobility devices. We explain this by noting that flakes conforming poorly to the substrate will have a higher carrier mobility which will however be reduced as heat treatment enhance the conformation. We finally show the electrical properties of graphene to be reversible upon heat treatments in air up to 200 degrees C.
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