Integrated temperature, humidity and gas sensors on flexible substrates for low-power applications

被引：10
|
作者：
Oprea, A. [1 ]
Barsan, N. [1 ]
Weimar, U. [1 ]
Courbat, J. [2 ]
Briand, D. [2 ]
de Rooij, N. F. [2 ]
机构：
[1] Univ Tubingen, Inst Phys & Theoret Chem, Tubingen, Germany
[2] Univ Neuchatel, Inst Microtechnol, Neuchatel, Switzerland
来源：
2007 IEEE SENSORS, VOLS 1-3 | 2007年
关键词：
D O I：
10.1109/ICSENS.2007.4388360
中图分类号：
TP18 [人工智能理论];
学科分类号：
081104 ; 0812 ; 0835 ; 1405 ;
摘要：
Temperature, gas and humidity resistive/ Capacitive sensors on flexible substrates from organic materials, suitable for RFED mobile applications, have been produced and investigated. The sensor implementation solutions are providing simple, versatile and low power temperature and gas detection. The device structure was developed together with the data evaluation strategies based on last generation LA analog (resistance and capacitance) to digital converters. We demonstrate the possibility of developing gas sensors on humidity sensitive substrates, having temperature corrected responses. The proposed device concept is aimed to evolve towards "flexible & full plastic" implementations.
引用
收藏
页码：158 / 161
页数：4
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