Integrated charge and position sensing for feedback control of electrostatic MEMS

被引：3

作者：

Anderson, RC ^{[1
]}

Kawade, B ^{[1
]}

Ragulan, K ^{[1
]}

Maithripala, DHS ^{[1
]}

Berg, JM ^{[1
]}

Gale, RO ^{[1
]}

Dayawansa, WP ^{[1
]}

机构：

[1] Sandia Natl Labs, MDLO, Albuquerque, NM 87185 USA

来源：

SMART STRUCTURES AND MATERIALS 2005: SENSORS AND SMART STRUCTURES TECHNOLOGIES FOR CIVIL, MECHANICAL, AND AEROSPACE, PTS 1 AND 2 | 2005年 / 5765卷

关键词：

electrostatic MEMS; nonlinear control; charge sensor; position sensor; integrated sensor;

D O I：

10.1117/12.600634

中图分类号：

V [航空、航天];

学科分类号：

08 ; 0825 ;

摘要：

Closed-loop control of electrostatic MEMS requires sensing to provide a feedback signal. We present an integrated sensor for charge and position that negligibly affects the open-loop dynamics, does not increase the device footprint, and may be easily fabricated. Numerical finite-element simulation, incorporating a realistic electrostatic field model, and experimental results validate the functionality of the sensor. Simulations show how the sensor may be used in conjunction with nonlinear control to provide full gap operation and improved transient performance. Nonlinear control is often considered too complex for convenient implementation, however the controller presented may be implemented using on-chip, local, integrated circuit components.

引用

页码：42 / 53

页数：12

共 35 条

[1]

ANDERSON RC, 2004, THESIS TEXAS TU

[2]

[Anonymous], 1993, ANALOG ELECT OP ARNP

[3] Continuous-membrane surface-micromachined silicon deformable mirror [J].