Theory and Practice of MEMS, NEMS, and MOEMS

被引：0
|
作者：
Lin, Yu-Cheng [1 ]
机构：
[1] Natl Cheng Kung Univ, Tainan 70101, Taiwan
来源：
JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS | 2011年 / 10卷 / 01期
关键词：
D O I：
10.1117/1.3567190
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
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页数：1
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