Low-energy ion beam sputtering of pre-patterned fused silica surfaces

被引：0

作者：

Voellner, J. ^{[1
]}

Ziberi, B. ^{[1
]}

Frost, F. ^{[1
]}

Rauschenbach, B. ^{[1
]}

机构：

[1] Leibniz Inst Oberflachenmodifizierung eV IOM, D-04318 Leipzig, Germany

来源：

ION BEAMS AND NANO-ENGINEERING | 2010年 / 1181卷

关键词：

TOPOGRAPHY; EROSION;

D O I：

暂无

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Ripple formation and smoothing of pre-patterned fused silica surfaces by low-energy ion beam erosion have been investigated. As pre-pattern ripple surfaces produced by low-energy Ar+ ion beam erosion were used. In addition to the enhanced ripple formation on the pre-patterned surfaces also the smoothing characteristics of surface is changed. Due to the anisotropic surface roughness of the ripple pattern the irradiation direction with respect to the pre-pattern becomes important. It is suggested that all of these effects are related to surface gradient dependent sputtering and therefore it is an important mechanisms also in the low-energy ion beam erosion of fused silica surfaces.

引用

页码：129 / 134

页数：6

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