Maskless patterning of KTiOPO4 crystals by focused ion beam

被引：6

作者：

Bachmann, T ^{[1
]}

Menzel, R ^{[1
]}

Wesch, W ^{[1
]}

Schmidt, C ^{[1
]}

机构：

[1] Friedrich Schiller Univ, Inst Festkorperphys, D-07743 Jena, Germany

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1998年 / 139卷 / 1-4期

关键词：

focused ion beam; KTP; sputtering;

D O I：

10.1016/S0168-583X(97)00959-2

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

KTiOPO4 was irradiated by a focused Ga+-ion beam to doses ranging from 3 x 10(14) to 1 x 10(18) Ga+ cm(-2) at energies between 10 and 50 keV. The irradiated squares were investigated with respect to surface topography by means of atomic force microscopy. The measurements indicate a monotonous increase of the sputtering yield with ion energy up to 25 keV. At higher energies the yield saturates. The results are discussed and compared with TRIM 87 calculations. As a possible application the manufacture of gratings is demonstrated. (C) 1998 Elsevier Science B.V.

引用

页码：318 / 321

页数：4

共 13 条

[1]

BACHMANN T, UNPUB APPL SURF SCI

[2] FABRICATION AND CHARACTERIZATION OF OPTICAL WAVE-GUIDES IN KTIOPO4 [J].

BIERLEIN, JD ;

FERRETTI, A ;

BRIXNER, LH ;

HSU, WY .

APPLIED PHYSICS LETTERS, 1987, 50 (18) :1216-1218

[3]

BIERSACK JP, 1985, STOPPING RANGES IONS, V1

[4] WRITING IMPLANTATION WITH A HIGH-CURRENT DENSITY FOCUSED ION-BEAM [J].

BISCHOFF, L ;

HESSE, E ;

PANKNIN, D ;

SKORUPA, W ;

TEICHERT, J .

MICROELECTRONIC ENGINEERING, 1994, 23 (1-4) :115-118

[5] POTASSIUM TITANYL PHOSPHATE KTIOPO4 (KTP) - RELATION BETWEEN CRYSTAL-STRUCTURE AND MORPHOLOGY [J].

BOLT, RJ ;

BENNEMA, P .

JOURNAL OF CRYSTAL GROWTH, 1990, 102 (1-2) :329-340

[6] ARROW's in KTiOPO4 [J].

Gehler, J ;

Karthe, W ;

Wachter, C ;

Brauer, A ;

Rasch, A ;

Rottschalk, M .

IEEE PHOTONICS TECHNOLOGY LETTERS, 1997, 9 (04) :470-472

[7]

LANBACHER DB, 1988, P SOC PHOTO-OPT INST, V993, P80

[8] Preparation of stopping masks for the P-LIGA technique with focused ion beams [J].

Menzel, R ;

Bachmann, T ;

Wesch, W ;

Schmidt, C .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1998, 139 (1-4) :359-362

[9]

SHI LP, 1992, THESIS U KOLN

[10] Waveguide formation of KTiOPO4 by multienergy MeV He+ implantation [J].

Wang, KM ;

Shi, BR ;

Ding, PJ ;

Wang, W ;

Lanford, WA ;

Zhuo, Z ;

Liu, YG .

JOURNAL OF MATERIALS RESEARCH, 1996, 11 (06) :1333-1335

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