X-ray diffraction and Raman scattering study of thermal-induced phase transformation in vertically aligned TiO2 nanocrystals grown on sapphire(100) via metal organic vapor deposition

被引:9
作者
Chen, C. A. [1 ]
Chen, K. Y. [1 ]
Huang, Y. S. [1 ]
Tsai, D. S. [2 ]
Tiong, K. K. [3 ]
Chien, F. Z. [4 ]
机构
[1] Natl Taiwan Univ Sci & Technol, Dept Elect Engn, Taipei 106, Taiwan
[2] Natl Taiwan Univ Sci & Technol, Dept Chem Engn, Taipei 106, Taiwan
[3] Natl Taiwan Ocean Univ, Dept Elect Engn, Chilung 202, Taiwan
[4] Tamkang Univ, Dept Phys, Tamsui 251, Taiwan
关键词
X-ray diffraction; nanostructures; Raman scattering; metal organic chemical vapor deposition; nanomaterials; oxides;
D O I
10.1016/j.jcrysgro.2008.05.021
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
We report a detailed study of thermal-induced phase transformation in TiO2 nanocrystals (NCs) via X-ray diffraction (XRD) and Raman scattering (RS) spectroscopy. Vertically aligned anatase TiO2(1 1 0) NCs were grown on the sapphire (SA)(1 0 0) substrate at 550 degrees C by metal organic chemical vapor deposition, using titanium-tetraisopropoxide (TTIP, Ti[OCH(CH3)(2)](4)), as the source reagent. The effects of thermal annealing of TiO2 NCs in oxygen atmosphere between 600 and 1000 degrees C were investigated. XRD and RS spectra showed the onset of the phase transformation process from the as-grown anatase TiO2(1 1 0) NCs into rutile TiO2(0 0 1) at the annealing temperature of 800 degrees C. At annealing temperature higher than 900 degrees C, pure rutile phase of TiO2(0 0 1) NCs were formed and the crystalline quality of TiO2 NCs could be further improved upon higher annealing temperature. (C) 2008 Elsevier B.V. All rights reserved.
引用
收藏
页码:3663 / 3667
页数:5
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