Surface evolution of sputtered Cu(In,Ga)Se2 thin films under various annealing temperatures

被引:10
作者
Han, Jun-feng [3 ]
Ouyang, Liang-qi [1 ]
Zhuang, Da-ming [1 ]
Zhao, Ming [1 ]
Liao, Cheng [1 ]
Liu, Jiang [1 ]
Cha, Limei [2 ,3 ]
Besland, M-P. [3 ]
机构
[1] Tsinghua Univ, Sch Mat Sci & Engn, Beijing 100084, Peoples R China
[2] Hunan Univ, Coll Mat Sci & Engn, Changsha 410082, Hunan, Peoples R China
[3] Univ Nantes, CNRS, UMR 6502, Inst Mat Jean Rouxel IMN, F-44322 Nantes, France
关键词
SOLAR-CELLS; RAMAN-SCATTERING; SELENIZATION; PRECURSORS; FABRICATION; MORPHOLOGY; DIFFUSION; MODULES; PHASES; GROWTH;
D O I
10.1007/s10854-015-2991-6
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this work, copper indium gallium selenide (CIGS) thin films were prepared by sputtering CIGS quaternary target and subsequent annealing under Se atmosphere in the 240-550 degrees C range. X-ray diffraction (XRD), Grazing incidence x-ray diffraction (GIXRD), Raman spectroscopy and X-ray photoelectron spectroscopy (XPS) were performed to investigate the crystalline structures and chemical compositions of the CIGS thin films. According to XRD, GIXRD and Raman analyses, the CIGS phase was splitted into CuSe phase and In4Se3 phase at the very surface when CIGS was annealed at 240 and 270 degrees C. In addition, XRD patterns indicated a grain size growth with increasing temperature. XPS analyses contributed more information on the film surface chemistry. Indeed, O 1 s and Na 1 s signals were observed at the film surface above 380 degrees C, and were even increased from 450 to 550 degrees C. Simultaneously, the surface appeared to exhibit a Cu and Ga poor surface chemical composition. The strong correlation between O, Na and Cu atomic contents in the CIGS surface were discussed in the paper.
引用
收藏
页码:4840 / 4847
页数:8
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