Optical properties of conductive ZnO films near infrared frequency

被引:2
作者
Itoh, T. [1 ,2 ]
Matsuyama, K. [1 ]
Shimakawa, K. [2 ]
Orava, J. [3 ]
Wagner, T. [3 ]
Frumar, M. [3 ]
机构
[1] Gifu Univ, Dept Elect Engn, 1-1 Yanagido, Gifu 5011193, Japan
[2] Gifu Univ, Ctr Innovat Photovolta Syst, Gifu 5011193, Japan
[3] Univ Pardubice, Dept Gen & Inorgan Chem, Pardubice 53210, Czech Republic
来源
PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 6, SUPPL 1 | 2009年 / 6卷
关键词
THIN-FILMS; SCATTERING;
D O I
10.1002/pssc.200881301
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
To know the optical constants, n and k, in transparent conductive zinc oxide (ZnO) films, both spectroscopic ellipsometry (SE) and reflectance-transmittance (RT) method have been adopted. The optical constants, n and k deduced from the SE are different from those estimated from the RT method. We will discuss these differences through the deduced physical parameters in magnetron sputtered Ga-doped ZnO films. (C) 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
引用
收藏
页码:S110 / S113
页数:4
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