A large-stroke electrostatic micro-actuator

被引:43
作者
Towfighian, S. [1 ]
Seleim, A. [2 ]
Abdel-Rahman, E. M. [3 ]
Heppler, G. R. [3 ]
机构
[1] Univ Toronto, Toronto, ON, Canada
[2] Univ Windsor, Windsor, ON N9B 3P4, Canada
[3] Univ Waterloo, Waterloo, ON N2L 3G1, Canada
关键词
PARALLEL-PLATE; TRAVEL RANGE; MEMS; STABILIZATION; CHAOS;
D O I
10.1088/0960-1317/21/7/075023
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Voltage-driven parallel-plate electrostatic actuators suffer from an operation range limit of 30% of the electrostatic gap; this has restrained their application in microelectromechanical systems. In this paper, the travel range of an electrostatic actuator made of a micro-cantilever beam above a fixed electrode is extended quasi-statically to 90% of the capacitor gap by introducing a voltage regulator (controller) circuit designed for low-frequency actuation. The voltage regulator reduces the actuator input voltage, and therefore the electrostatic force, as the beam approaches the fixed electrode so that balance is maintained between the mechanical restoring force and the electrostatic force. The low-frequency actuator also shows evidence of high-order superharmonic resonances that are observed here for the first time in electrostatic actuators.
引用
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页数:12
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