Evaluation on mass sensitivity of SAW sensors for different piezoelectric materials using finite element analysis

被引：0
|
作者：
Abdollahi, Amir [1 ]
Jiang, Zhongwei [1 ]
Arabshahi, Sayyed Alireza. [1 ]
机构：
[1] Yamaguchi Univ, Grad Sch Sci & Engn, Yamaguchi 7558611, Japan
来源：
2007 SIXTEENTH IEEE INTERNATIONAL SYMPOSIUM ON THE APPLICATIONS OF FERROELECTRICS, VOLS 1 AND 2 | 2007年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The mass sensitivity of the piezoelectric surface acoustic wave (SAW) sensors is an important factor in the selection of the best gravimetric sensors for different applications. To determine this value without facing the practical problems and consuming long theoretical calculation time, we have shown that the mass sensitivity of SAW sensors can be calculated by a simple 3D finite element analysis (FEA) using ANSYS platform. The FEA data were used to calculate the wave propagation speed, surface particle displacements and wave energy distribution on different cuts of various piezoelectric materials. Meanwhile, to calculate more accurate results from FEA data, wave reflection problem was considered in the analysis. The results are used to provide a simple method for evaluation of their mass sensitivities.
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收藏
页码：731 / 734
页数：4
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