Single-pulse femtosecond laser machining of glass

被引:29
作者
Campbell, S [1 ]
Dear, FC
Hand, DP
Reid, DT
机构
[1] Heriot Watt Univ, Sch Engn & Phys Sci, Ultrafast Opt Grp, Edinburgh EH14 4AS, Midlothian, Scotland
[2] Heriot Watt Univ, Sch Engn & Phys Sci, Appl Opt & Photon Grp, Edinburgh EH14 4AS, Midlothian, Scotland
来源
JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS | 2005年 / 7卷 / 04期
基金
英国工程与自然科学研究理事会;
关键词
laser processing; laser ablation; femtosecond machining;
D O I
10.1088/1464-4258/7/4/002
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We describe a study of single-pulse machining of glass with 150 fs pulses at 800 nm (Ti:sapphire) and present results demonstrating in a quantitative way the dependence of the machining quality on the focal position and the pulse energy of the laser beam. We report experimental results indicating the creation of sub-diffraction limited structures. A theoretical calculation of the ablation threshold of glass is inferred from our experimental results to be 5.55 J cm(-2). Results are also presented that illustrate the dependence of the machining quality on the pulse duration used. A technique for optimizing the focal position at energies below the machining threshold is detailed and the results of a related study investigating the self-focusing of femtosecond beams in air are described.
引用
收藏
页码:162 / 168
页数:7
相关论文
共 15 条
  • [1] Femtosecond laser microstructuring of materials
    Ameer-Beg, S
    Perrie, W
    Rathbone, S
    Wright, J
    Weaver, W
    Champoux, H
    [J]. APPLIED SURFACE SCIENCE, 1998, 127 : 875 - 880
  • [2] Fundamentals and advantages of ultrafast micro-structuring of transparent materials
    Ashkenasi, D
    Müller, G
    Rosenfeld, A
    Stoian, R
    Hertel, IV
    Bulgakova, NM
    Campbell, EEB
    [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2003, 77 (02): : 223 - 228
  • [3] Sub-diffraction limited structuring of solid targets with femtosecond laser pulses
    Korte, F
    Adams, S
    Egbert, A
    Fallnich, C
    Ostendorf, A
    Nolte, S
    Will, M
    Ruske, JP
    Chichkov, BN
    Tünnermann, A
    [J]. OPTICS EXPRESS, 2000, 7 (02): : 41 - 49
  • [4] Beam delivery of femtosecond laser radiation by diffractive optical elements
    Momma, C
    Nolte, S
    Kamlage, G
    von Alvensleben, F
    Tunnermann, A
    [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1998, 67 (05): : 517 - 520
  • [5] Determination of the inertial contribution to the nonlinear refractive index of air, N-2, and O-2 by use of unfocused high-intensity femtosecond laser pulses
    Nibbering, ETJ
    Grillon, G
    Franco, MA
    Prade, BS
    Mysyrowicz, A
    [J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS, 1997, 14 (03) : 650 - 660
  • [6] MACHINING OF SUBMICRON HOLES USING A FEMTOSECOND LASER AT 800-NM
    PRONKO, PP
    DUTTA, SK
    SQUIER, J
    RUDD, JV
    DU, D
    MOUROU, G
    [J]. OPTICS COMMUNICATIONS, 1995, 114 (1-2) : 106 - 110
  • [7] Femtosecond laser deep hole drilling of silicate glasses in air
    Shah, L
    Tawney, J
    Richardson, M
    Richardson, K
    [J]. APPLIED SURFACE SCIENCE, 2001, 183 (3-4) : 151 - 164
  • [8] Siegman AE., 1986, LASERS
  • [9] Optical ablation by high-power short-pulse lasers
    Stuart, BC
    Feit, MD
    Herman, S
    Rubenchik, AM
    Shore, BW
    Perry, MD
    [J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS, 1996, 13 (02) : 459 - 468
  • [10] SUN J, 1999, THERM SCI ENG, V7, P81