THICKNESS RATIO OF SUPPORT MEMBRANES FOR UNCOOLED INFRARED MICROBOLOMETER

被引：0

作者：

Xu Lu-Jia ^{[1
]}

Hu Ming ^{[1
]}

Yang Hai-Bo ^{[1
]}

Yang Meng-Lin ^{[1
]}

Zhang Jie ^{[1
]}

机构：

[1] Tianjin Univ, Sch Elect Informat Engn, Tianjin 300072, Peoples R China

来源：

JOURNAL OF INFRARED AND MILLIMETER WAVES | 2010年 / 29卷 / 04期

关键词：

uncooled infrared imaging; support membranes; microbolometer; microbridge structure; thickness ratio; SENSORS;

D O I：

暂无

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Based on the technology of monolayer microbolometer, which used Si3N4 and SiO2 double-layer membrane supporting materials, the analytic expressions of the normal stress and the thermal conductivity of the microbridge leg were derived by using the mechanical equivalent cross-section methods and the composite thermal conductivity formula. The influence of the thickness ratio m of Si3N4 to SiO2 on the mechanical and thermal characteristics of microbridge was analyzed when other factors were not changed. At last, the theoretical derivation was verified by the method of ANSYS finite element simulation.

引用

页码：251 / 254

页数：4

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