Detecting Nano-Scale Vibrations in Rotating Devices by Using Advanced Computational Methods

被引：1
作者：
del Toro, Raul M. [1 ]
Haber, Rodolfo E. [1 ,2 ]
Schmittdiel, Michael C. [1 ]
机构：
[1] Consejo Super Invest Cient, Ctr Automat & Robot, Madrid 28500, Spain
[2] Univ Autonoma Madrid, Escuela Politecn Super, E-28049 Madrid, Spain
来源：
SENSORS | 2010年 / 10卷 / 05期
关键词：
vibration measurement; signal processing algorithm; frequency domain analysis; nanotechnology;
D O I：
10.3390/s100504983
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
This paper presents a computational method for detecting vibrations related to eccentricity in ultra precision rotation devices used for nano-scale manufacturing. The vibration is indirectly measured via a frequency domain analysis of the signal from a piezoelectric sensor attached to the stationary component of the rotating device. The algorithm searches for particular harmonic sequences associated with the eccentricity of the device rotation axis. The detected sequence is quantified and serves as input to a regression model that estimates the eccentricity. A case study presents the application of the computational algorithm during precision manufacturing processes.
引用
收藏
页码：4983 / 4995
页数：13
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