ion beam lithography;
light emitting diodes;
light transmission;
microfabrication;
micro-optics;
optical elements;
optical fabrication;
ray tracing;
solar cells;
thin films;
two-photon processes;
D O I:
10.1063/1.3648115
中图分类号:
O59 [应用物理学];
学科分类号:
摘要:
We have fabricated microphotonic parabolic light directors using two-photon lithography, thin-film processing, and aperture formation by focused ion beam lithography. Optical transmission measurements through upright parabolic directors 22 mu m high and 10 mu m in diameter exhibit strong beam directivity with a beam divergence of 5.6 degrees, in reasonable agreement with ray-tracing and full-field electromagnetic simulations. The results indicate the suitability of microphotonic parabolic light directors for producing collimated beams for applications in advanced solar cell and light-emitting diode designs. (C) 2011 American Institute of Physics. [doi:10.1063/1.3648115]