In this work, a set of varying-thickness poly[styrene-co-acrylonitrile] films implanted with 50 keV N+ ions to a dose of 5x10(16) ions/cm(2) were used to show the inhomogeneous characteristic of structure and property within the implanted layer. It is indicated that compositional alteration and property enhancements are primarily resulted from electronic energy deposition processes. Results of hydrogen reduction, enhanced electrical conductivity, and increased optical absorption are discussed along with ion energy deposition mechanism and ion-induced microstructure in polymers.